Controlling the dopant dose in silicon by mixed-monolayer doping

Liang Ye, Sidharam P. Pujari, Han Zuilhof, Tibor Kudernac, Machiel Pieter de Jong, Wilfred Gerard van der Wiel, Jurriaan Huskens

Research output: Contribution to journalArticleAcademicpeer-review

45 Citations (Scopus)

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Chemical Compounds

Engineering & Materials Science