Copper chemical mechanical polishing: Problem, model and solution

Research output: Other contribution › Other research output

Keywords

@misc{127539c9309d4361ad79ce3157055345,

title = "Copper chemical mechanical polishing: Problem, model and solution",

keywords = "METIS-114861",

author = "\{Nguyen Hoang\}, V. and \{van der Velden\}, P. and R. Daamen and \{van Kranenburg\}, H. and P.H. Woerlee",

year = "2000",

month = sep,

day = "22",

language = "Undefined",

type = "Other",

}