Copper Chemical Mechanical Polishing Using Fixed-abrasive Polishing Pad

V. Nguyen Hoang, A. Hof, H. van Kranenburg, P.H. Woerlee, F. Weimar

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Keywords

@inproceedings{37adedc925ba44f1b22db37de86b802b,

title = "Copper Chemical Mechanical Polishing Using Fixed-abrasive Polishing Pad",

keywords = "METIS-113897",

author = "\{Nguyen Hoang\}, V. and A. Hof and \{van Kranenburg\}, H. and P.H. Woerlee and F. Weimar",

year = "1999",

month = nov,

day = "24",

language = "Undefined",

isbn = "90-73461-18-9",

pages = "339--342",

booktitle = "SAFE'99",

}