Copper for Advance Interconnect

V. Nguyen Hoang, H. van Kranenburg, F. Weimar, P.H. Woerlee, A.J. Hof

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	The Third International Workshop on Materials Science
Place of Publication	Hanoi, Vietnam
Pages	90-99
Number of pages	10
Publication status	Published - 2 Nov 1999

Keywords

@inproceedings{9515ac569ae54b1ab8a0889de17c0c87,

title = "Copper for Advance Interconnect",

keywords = "METIS-113902",

author = "{Nguyen Hoang}, V. and {van Kranenburg}, H. and F. Weimar and P.H. Woerlee and A.J. Hof",

year = "1999",

month = nov,

day = "2",

language = "Undefined",

isbn = "90-5776-033-9",

pages = "90--99",

booktitle = "The Third International Workshop on Materials Science",

}