Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12]

Juequan Chen*, Eric Louis, Rob Harmsen, Tim Tsarfati, Herbert Wormeester, Maarten van Kampen, Willem van Schaik, Robbert van de Kruijs, Fred Bijkerk

*Corresponding author for this work

Research output: Contribution to journalComment/Letter to the editorAcademicpeer-review

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