Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]

Juequan Chen; Eric Louis; Rob Harmsen; Tim Tsarfati; Herbert Wormeester; Maarten van Kampen; Willem van Schaik; Robbert van de Kruijs; Fred Bijkerk

doi:10.1016/j.apsusc.2022.155765

Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]

Juequan Chen^*, Eric Louis, Rob Harmsen, Tim Tsarfati, Herbert Wormeester, Maarten van Kampen, Willem van Schaik, Robbert van de Kruijs, Fred Bijkerk

^*Corresponding author for this work

Research output: Contribution to journal › Comment/Letter to the editor › Academic › peer-review

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Abstract

The authors regret an error in Ref. [19]. The correct reference should read: [19] O. Wolfgang, J.R. Hofer (Eds.), Physical processes of the interaction of fusion plasmas with solids, Academic Press, 1996. The authors would like to apologise for any inconvenience caused.

Original language	English
Article number	155765
Journal	Applied surface science
DOIs	https://doi.org/10.1016/j.apsusc.2022.155765
Publication status	E-pub ahead of print/First online - 30 Nov 2022

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Chen, J., Louis, E., Harmsen, R., Tsarfati, T., Wormeester, H., van Kampen, M., van Schaik, W., van de Kruijs, R., & Bijkerk, F. (2022). Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]. Applied surface science, [155765]. https://doi.org/10.1016/j.apsusc.2022.155765

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title = "Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]",

abstract = "The authors regret an error in Ref. [19]. The correct reference should read: [19] O. Wolfgang, J.R. Hofer (Eds.), Physical processes of the interaction of fusion plasmas with solids, Academic Press, 1996. The authors would like to apologise for any inconvenience caused.",

author = "Juequan Chen and Eric Louis and Rob Harmsen and Tim Tsarfati and Herbert Wormeester and {van Kampen}, Maarten and {van Schaik}, Willem and {van de Kruijs}, Robbert and Fred Bijkerk",

note = "Publisher Copyright: {\textcopyright} 2011 Elsevier B.V.",

year = "2022",

month = nov,

day = "30",

doi = "10.1016/j.apsusc.2022.155765",

language = "English",

journal = "Applied surface science",

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Chen, J, Louis, E, Harmsen, R, Tsarfati, T, Wormeester, H, van Kampen, M, van Schaik, W, van de Kruijs, R & Bijkerk, F 2022, 'Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]', Applied surface science. https://doi.org/10.1016/j.apsusc.2022.155765

Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]. / Chen, Juequan; Louis, Eric; Harmsen, Rob et al.
In: Applied surface science, 30.11.2022.

Research output: Contribution to journal › Comment/Letter to the editor › Academic › peer-review

TY - JOUR

T1 - Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]

AU - Chen, Juequan

AU - Louis, Eric

AU - Harmsen, Rob

AU - Tsarfati, Tim

AU - Wormeester, Herbert

AU - van Kampen, Maarten

AU - van Schaik, Willem

AU - van de Kruijs, Robbert

AU - Bijkerk, Fred

PY - 2022/11/30

Y1 - 2022/11/30

N2 - The authors regret an error in Ref. [19]. The correct reference should read: [19] O. Wolfgang, J.R. Hofer (Eds.), Physical processes of the interaction of fusion plasmas with solids, Academic Press, 1996. The authors would like to apologise for any inconvenience caused.

AB - The authors regret an error in Ref. [19]. The correct reference should read: [19] O. Wolfgang, J.R. Hofer (Eds.), Physical processes of the interaction of fusion plasmas with solids, Academic Press, 1996. The authors would like to apologise for any inconvenience caused.

UR - http://www.scopus.com/inward/record.url?scp=85144014881&partnerID=8YFLogxK

U2 - 10.1016/j.apsusc.2022.155765

DO - 10.1016/j.apsusc.2022.155765

M3 - Comment/Letter to the editor

AN - SCOPUS:85144014881

SN - 0169-4332

JO - Applied surface science

JF - Applied surface science

M1 - 155765

ER -

Chen J, Louis E, Harmsen R, Tsarfati T, Wormeester H, van Kampen M et al. Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]. Applied surface science. 2022 Nov 30;155765. Epub 2022 Nov 30. doi: 10.1016/j.apsusc.2022.155765

Corrigendum to “In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers” [Appl. Surf. Sci. 258(1) (2011) 7–12, (S0169433211011883), (10.1016/j.apsusc.2011.07.121)]

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In situ ellipsometry study of atomic hydrogen etching of extreme ultraviolet induced carbon layers

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