Cricket inspired flow-sensor arrays

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    Abstract

    We report current developments in biomimetic flow-sensors based on mechanoreceptive sensory hairs of crickets. These filiform hairs are highly perceptive to lowfrequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate allowing for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Based on a hydrodynamic – mechanical interaction model we derive a figure of merit. We present optical measurements on acoustically excited hair-sensors. Experimental data and the derived models are shown to exhibit good correspondence.
    Original languageUndefined
    Title of host publicationIEEE Sensors 2007
    Place of PublicationPiscataway, NJ 08855-1331
    PublisherIEEE
    Pages539-546
    Number of pages8
    ISBN (Print)1-4244-1262-5
    DOIs
    Publication statusPublished - 28 Oct 2007
    Event2007 IEEE Sensors - The Hyatt Regency Atlanta, Atlanta, United States
    Duration: 28 Oct 200731 Oct 2007

    Publication series

    Name
    PublisherIEEE
    Number07CH37910C
    ISSN (Print)1930-0395

    Conference

    Conference2007 IEEE Sensors
    CountryUnited States
    CityAtlanta
    Period28/10/0731/10/07

    Keywords

    • TST-Life like
    • TST-SENSORS
    • METIS-245901
    • IR-64560
    • EWI-11653

    Cite this

    Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Casas, J. (2007). Cricket inspired flow-sensor arrays. In IEEE Sensors 2007 (pp. 539-546). [10.1109/ICSENS.2007.4388455] Piscataway, NJ 08855-1331: IEEE. https://doi.org/10.1109/ICSENS.2007.4388455