Cricket inspired flow-sensor arrays

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

30 Citations (Scopus)
134 Downloads (Pure)

Abstract

We report current developments in biomimetic flow-sensors based on mechanoreceptive sensory hairs of crickets. These filiform hairs are highly perceptive to lowfrequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate allowing for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Based on a hydrodynamic – mechanical interaction model we derive a figure of merit. We present optical measurements on acoustically excited hair-sensors. Experimental data and the derived models are shown to exhibit good correspondence.
Original languageUndefined
Title of host publicationIEEE Sensors 2007
Place of PublicationPiscataway, NJ 08855-1331
PublisherIEEE
Pages539-546
Number of pages8
ISBN (Print)1-4244-1262-5
DOIs
Publication statusPublished - 28 Oct 2007
Event2007 IEEE Sensors - The Hyatt Regency Atlanta, Atlanta, United States
Duration: 28 Oct 200731 Oct 2007

Publication series

Name
PublisherIEEE
Number07CH37910C
ISSN (Print)1930-0395

Conference

Conference2007 IEEE Sensors
CountryUnited States
CityAtlanta
Period28/10/0731/10/07

Keywords

  • TST-Life like
  • TST-SENSORS
  • METIS-245901
  • IR-64560
  • EWI-11653

Cite this

Krijnen, G. J. M., Lammerink, T. S. J., Wiegerink, R. J., & Casas, J. (2007). Cricket inspired flow-sensor arrays. In IEEE Sensors 2007 (pp. 539-546). [10.1109/ICSENS.2007.4388455] Piscataway, NJ 08855-1331: IEEE. https://doi.org/10.1109/ICSENS.2007.4388455
Krijnen, Gijsbertus J.M. ; Lammerink, Theodorus S.J. ; Wiegerink, Remco J. ; Casas, J. / Cricket inspired flow-sensor arrays. IEEE Sensors 2007. Piscataway, NJ 08855-1331 : IEEE, 2007. pp. 539-546
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title = "Cricket inspired flow-sensor arrays",
abstract = "We report current developments in biomimetic flow-sensors based on mechanoreceptive sensory hairs of crickets. These filiform hairs are highly perceptive to lowfrequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate allowing for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Based on a hydrodynamic – mechanical interaction model we derive a figure of merit. We present optical measurements on acoustically excited hair-sensors. Experimental data and the derived models are shown to exhibit good correspondence.",
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author = "Krijnen, {Gijsbertus J.M.} and Lammerink, {Theodorus S.J.} and Wiegerink, {Remco J.} and J. Casas",
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Krijnen, GJM, Lammerink, TSJ, Wiegerink, RJ & Casas, J 2007, Cricket inspired flow-sensor arrays. in IEEE Sensors 2007., 10.1109/ICSENS.2007.4388455, IEEE, Piscataway, NJ 08855-1331, pp. 539-546, 2007 IEEE Sensors, Atlanta, United States, 28/10/07. https://doi.org/10.1109/ICSENS.2007.4388455

Cricket inspired flow-sensor arrays. / Krijnen, Gijsbertus J.M.; Lammerink, Theodorus S.J.; Wiegerink, Remco J.; Casas, J.

IEEE Sensors 2007. Piscataway, NJ 08855-1331 : IEEE, 2007. p. 539-546 10.1109/ICSENS.2007.4388455.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Cricket inspired flow-sensor arrays

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N2 - We report current developments in biomimetic flow-sensors based on mechanoreceptive sensory hairs of crickets. These filiform hairs are highly perceptive to lowfrequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate allowing for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Based on a hydrodynamic – mechanical interaction model we derive a figure of merit. We present optical measurements on acoustically excited hair-sensors. Experimental data and the derived models are shown to exhibit good correspondence.

AB - We report current developments in biomimetic flow-sensors based on mechanoreceptive sensory hairs of crickets. These filiform hairs are highly perceptive to lowfrequency sound with energy sensitivities close to thermal threshold. In this work we describe hair-sensors fabricated by a combination of sacrificial poly-silicon technology, to form silicon-nitride suspended membranes, and SU8 polymer processing for fabrication of hairs with diameters of about 50 μm and up to 1 mm length. The membranes have thin chromium electrodes on top forming variable capacitors with the substrate allowing for capacitive read-out. Previously these sensors have been shown to exhibit acoustic sensitivity. Based on a hydrodynamic – mechanical interaction model we derive a figure of merit. We present optical measurements on acoustically excited hair-sensors. Experimental data and the derived models are shown to exhibit good correspondence.

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Krijnen GJM, Lammerink TSJ, Wiegerink RJ, Casas J. Cricket inspired flow-sensor arrays. In IEEE Sensors 2007. Piscataway, NJ 08855-1331: IEEE. 2007. p. 539-546. 10.1109/ICSENS.2007.4388455 https://doi.org/10.1109/ICSENS.2007.4388455