Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

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    Abstract

    This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.
    Original languageUndefined
    Pages726-729
    Publication statusPublished - 2004
    EventAnnual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 - Veldhoven, Netherlands
    Duration: 25 Nov 200426 Nov 2004

    Workshop

    WorkshopAnnual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004
    Abbreviated titleSAFE
    CountryNetherlands
    CityVeldhoven
    Period25/11/0426/11/04

    Keywords

    • IR-59581

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