Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

J.J.J. van Baar; Marcel Dijkstra; Remco J. Wiegerink; Theodorus S.J. Lammerink; Gijsbertus J.M. Krijnen

Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

J.J.J. van Baar, Marcel Dijkstra, Remco J. Wiegerink, Theodorus S.J. Lammerink, Gijsbertus J.M. Krijnen

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Abstract

This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.

Original language	Undefined
Pages	726-729
Publication status	Published - 2004
Event	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 - Veldhoven, Netherlands Duration: 25 Nov 2004 → 26 Nov 2004

Workshop

Workshop	Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004
Abbreviated title	SAFE
Country/Territory	Netherlands
City	Veldhoven
Period	25/11/04 → 26/11/04

Keywords

IR-59581

Access to Document

Baar04cricket

Cite this

@conference{52a62ca50e25498d8ee36bf022ab2f25,

title = "Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection",

abstract = "This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.",

keywords = "IR-59581",

author = "{van Baar}, J.J.J. and Marcel Dijkstra and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Krijnen, {Gijsbertus J.M.}",

year = "2004",

language = "Undefined",

pages = "726--729",

note = "null ; Conference date: 25-11-2004 Through 26-11-2004",

}

TY - CONF

T1 - Cricket inspired sensory hairs on suspended membranes with capacitive displacement detection

AU - van Baar, J.J.J.

AU - Dijkstra, Marcel

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Krijnen, Gijsbertus J.M.

PY - 2004

Y1 - 2004

N2 - This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.

AB - This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.

KW - IR-59581

M3 - Paper

SP - 726

EP - 729

Y2 - 25 November 2004 through 26 November 2004

ER -