This paper presents the fabrication of artificial hairs of siliconnitride and SU-8 on suspended membranes for flow sensing applications. The suspended membranes contain electrodes for capacitive sensing of the rotation of the hairs. For the siliconnitride hairs a silicon wafer is used as mould and for SU-8 hairs a thick layer was spun. Capacity-voltage measurements have been carried out.
|Publication status||Published - 2004|
|Event||Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004 - Veldhoven, Netherlands|
Duration: 25 Nov 2004 → 26 Nov 2004
|Workshop||Annual Workshop on Semiconductor Advances for Future Electronics, SAFE 2004|
|Period||25/11/04 → 26/11/04|