Cryogenic imaging x-ray spectrometer

Remco J. Wiegerink, J.J.J. van Baar, J.H. de Boer, M.L. Ridder, M.P. Bruijn, A. Germeau, H.F.C. Hoevers

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    Abstract

    A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.
    Original languageUndefined
    Title of host publication18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
    Place of PublicationLos Alamitos
    PublisherIEEE Computer Society
    Pages56-59
    Number of pages4
    ISBN (Print)0-7803-8732-5
    DOIs
    Publication statusPublished - 2005
    Event18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States
    Duration: 30 Jan 20053 Feb 2005
    Conference number: 18

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
    Abbreviated titleMEMS
    CountryUnited States
    CityMiami Beach
    Period30/01/053/02/05

    Keywords

    • EWI-9917
    • IR-54398
    • METIS-228532

    Cite this

    Wiegerink, R. J., van Baar, J. J. J., de Boer, J. H., Ridder, M. L., Bruijn, M. P., Germeau, A., & Hoevers, H. F. C. (2005). Cryogenic imaging x-ray spectrometer. In 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. (pp. 56-59). Los Alamitos: IEEE Computer Society. https://doi.org/10.1109/MEMSYS.2005.1453866