Cryogenic imaging x-ray spectrometer

Remco J. Wiegerink; J.J.J. van Baar; J.H. de Boer; M.L. Ridder; M.P. Bruijn; A. Germeau; H.F.C. Hoevers

doi:10.1109/MEMSYS.2005.1453866

Cryogenic imaging x-ray spectrometer

Remco J. Wiegerink, J.J.J. van Baar, J.H. de Boer, M.L. Ridder, M.P. Bruijn, A. Germeau, H.F.C. Hoevers

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.

Original language	Undefined
Title of host publication	18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.
Place of Publication	Los Alamitos
Publisher	IEEE
Pages	56-59
Number of pages	4
ISBN (Print)	0-7803-8732-5
DOIs	https://doi.org/10.1109/MEMSYS.2005.1453866
Publication status	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 - Fontainebleau Hilton Resort, Miami Beach, United States Duration: 30 Jan 2005 → 3 Feb 2005 Conference number: 18

Publication series

Name
Publisher	IEEE

Conference

Conference	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005
Abbreviated title	MEMS
Country/Territory	United States
City	Miami Beach
Period	30/01/05 → 3/02/05

Keywords

EWI-9917
IR-54398
METIS-228532

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/MEMSYS.2005.1453866

Cite this

@inproceedings{67dfa67ff5cb43568bbb1f7e97ad9708,

title = "Cryogenic imaging x-ray spectrometer",

abstract = "A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.",

keywords = "EWI-9917, IR-54398, METIS-228532",

author = "Wiegerink, {Remco J.} and {van Baar}, J.J.J. and {de Boer}, J.H. and M.L. Ridder and M.P. Bruijn and A. Germeau and H.F.C. Hoevers",

year = "2005",

doi = "10.1109/MEMSYS.2005.1453866",

language = "Undefined",

isbn = "0-7803-8732-5",

publisher = "IEEE",

pages = "56--59",

booktitle = "18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.",

address = "United States",

note = "18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 ; Conference date: 30-01-2005 Through 03-02-2005",

}

Wiegerink, RJ, van Baar, JJJ, de Boer, JH, Ridder, ML, Bruijn, MP, Germeau, A & Hoevers, HFC 2005, Cryogenic imaging x-ray spectrometer. in 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.. IEEE, Los Alamitos, pp. 56-59, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, Florida, United States, 30/01/05. https://doi.org/10.1109/MEMSYS.2005.1453866

TY - GEN

T1 - Cryogenic imaging x-ray spectrometer

AU - Wiegerink, Remco J.

AU - van Baar, J.J.J.

AU - de Boer, J.H.

AU - Ridder, M.L.

AU - Bruijn, M.P.

AU - Germeau, A.

AU - Hoevers, H.F.C.

N1 - Conference code: 18

PY - 2005

Y1 - 2005

N2 - A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.

AB - A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA's XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 /spl times/ 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 /spl times/ 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.

KW - EWI-9917

KW - IR-54398

KW - METIS-228532

U2 - 10.1109/MEMSYS.2005.1453866

DO - 10.1109/MEMSYS.2005.1453866

M3 - Conference contribution

SN - 0-7803-8732-5

SP - 56

EP - 59

BT - 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005.

PB - IEEE

CY - Los Alamitos

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005

Y2 - 30 January 2005 through 3 February 2005

ER -