Crystal structure of laser-induced subsurface modifications in Si

P.C. Verburg*, L.A. Smillie, G R.B.E. Römer, B. Haberl, J.E. Bradby, J.S. Williams, A.J. Huis in ’t Veld

*Corresponding author for this work

    Research output: Contribution to journal › Article › Academic › peer-review

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