"CV doping profiling of boron out-diffusion using an abrupt and highly doped arsenic buried epilayer"
C. J. Ortiz*, L. K. Nanver, W. D. Van Noort, T. L.M. Scholtes, J. W. Slotboom
*Corresponding author for this work
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review