Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski, S. Bruijn, A.R. Khorsand, E. Louis, R.W.E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, Michael Gleeson, J. Grzonka, E.M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J.B. Pelka, T. PlocinskiM. Rasinski, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, F. Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

27 Citations (Scopus)
11 Downloads (Pure)
Original languageEnglish
Pages (from-to)193-205
JournalOptics express
Volume19
Issue number1
DOIs
Publication statusPublished - 2011

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