Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski; S. Bruijn; A.R. Khorsand; Eric Louis; Robbert Wilhelmus Elisabeth van de Kruijs; T. Burian; J. Chalupsky; J. Cihelka; Michael Gleeson; J. Grzonka; E.M. Gullikson; V. Hajkova; S. Hau-Riege; L. Juha; M. Jurek; D. Klinger; J. Krzywinski; R. London; J.B. Pelka; T. Plocinski; M. Rasinski; K. Tiedtke; S. Toleikis; L. Vysin; H. Wabnitz; Frederik Bijkerk

doi:10.1364/OE.19.000193

Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski, S. Bruijn, A.R. Khorsand, Eric Louis, Robbert Wilhelmus Elisabeth van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, Michael Gleeson, J. Grzonka, E.M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J.B. Pelka, T. PlocinskiM. Rasinski, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, Frederik Bijkerk

Laser Physics & Nonlinear Optics

Research output: Contribution to journal › Article › Academic › peer-review

27 Citations (Scopus)

Original language	English
Pages (from-to)	193-205
Journal	Optics express
Volume	19
Issue number	1
DOIs	https://doi.org/10.1364/OE.19.000193
Publication status	Published - 2011

Keywords

METIS-277895

Access to Document

10.1364/OE.19.000193

Cite this

Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W. E., Burian, T., Chalupsky, J., Cihelka, J., Gleeson, M., Grzonka, J., Gullikson, E. M., Hajkova, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., ... Bijkerk, F. (2011). Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. Optics express, 19(1), 193-205. https://doi.org/10.1364/OE.19.000193

Sobierajski, R. ; Bruijn, S. ; Khorsand, A.R. ; Louis, Eric ; van de Kruijs, Robbert Wilhelmus Elisabeth ; Burian, T. ; Chalupsky, J. ; Cihelka, J. ; Gleeson, Michael ; Grzonka, J. ; Gullikson, E.M. ; Hajkova, V. ; Hau-Riege, S. ; Juha, L. ; Jurek, M. ; Klinger, D. ; Krzywinski, J. ; London, R. ; Pelka, J.B. ; Plocinski, T. ; Rasinski, M. ; Tiedtke, K. ; Toleikis, S. ; Vysin, L. ; Wabnitz, H. ; Bijkerk, Frederik. / Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. In: Optics express. 2011 ; Vol. 19, No. 1. pp. 193-205.

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title = "Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources",

keywords = "METIS-277895",

author = "R. Sobierajski and S. Bruijn and A.R. Khorsand and Eric Louis and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and T. Burian and J. Chalupsky and J. Cihelka and Michael Gleeson and J. Grzonka and E.M. Gullikson and V. Hajkova and S. Hau-Riege and L. Juha and M. Jurek and D. Klinger and J. Krzywinski and R. London and J.B. Pelka and T. Plocinski and M. Rasinski and K. Tiedtke and S. Toleikis and L. Vysin and H. Wabnitz and Frederik Bijkerk",

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Sobierajski, R, Bruijn, S, Khorsand, AR, Louis, E , van de Kruijs, RWE, Burian, T, Chalupsky, J, Cihelka, J, Gleeson, M, Grzonka, J, Gullikson, EM, Hajkova, V, Hau-Riege, S, Juha, L, Jurek, M, Klinger, D, Krzywinski, J, London, R, Pelka, JB, Plocinski, T, Rasinski, M, Tiedtke, K, Toleikis, S, Vysin, L, Wabnitz, H & Bijkerk, F 2011, 'Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources', Optics express, vol. 19, no. 1, pp. 193-205. https://doi.org/10.1364/OE.19.000193

Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. / Sobierajski, R.; Bruijn, S.; Khorsand, A.R.; Louis, Eric ; van de Kruijs, Robbert Wilhelmus Elisabeth; Burian, T.; Chalupsky, J.; Cihelka, J.; Gleeson, Michael; Grzonka, J.; Gullikson, E.M.; Hajkova, V.; Hau-Riege, S.; Juha, L.; Jurek, M.; Klinger, D.; Krzywinski, J.; London, R.; Pelka, J.B.; Plocinski, T.; Rasinski, M.; Tiedtke, K.; Toleikis, S.; Vysin, L.; Wabnitz, H.; Bijkerk, Frederik.

In: Optics express, Vol. 19, No. 1, 2011, p. 193-205.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

AU - Sobierajski, R.

AU - Bruijn, S.

AU - Khorsand, A.R.

AU - Louis, Eric

AU - van de Kruijs, Robbert Wilhelmus Elisabeth

AU - Burian, T.

AU - Chalupsky, J.

AU - Cihelka, J.

AU - Gleeson, Michael

AU - Grzonka, J.

AU - Gullikson, E.M.

AU - Hajkova, V.

AU - Hau-Riege, S.

AU - Juha, L.

AU - Jurek, M.

AU - Klinger, D.

AU - Krzywinski, J.

AU - London, R.

AU - Pelka, J.B.

AU - Plocinski, T.

AU - Rasinski, M.

AU - Tiedtke, K.

AU - Toleikis, S.

AU - Vysin, L.

AU - Wabnitz, H.

AU - Bijkerk, Frederik

PY - 2011

Y1 - 2011

KW - METIS-277895

U2 - 10.1364/OE.19.000193

DO - 10.1364/OE.19.000193

M3 - Article

VL - 19

SP - 193

EP - 205

JO - Optics express

JF - Optics express

SN - 1094-4087

IS - 1

ER -