Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski, S. Bruijn, A.R. Khorsand, Eric Louis, Robbert Wilhelmus Elisabeth van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, Michael Gleeson, J. Grzonka, E.M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J.B. Pelka, T. PlocinskiM. Rasinski, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, Frederik Bijkerk

Research output: Contribution to journalArticleAcademicpeer-review

27 Citations (Scopus)
Original languageEnglish
Pages (from-to)193-205
JournalOptics express
Volume19
Issue number1
DOIs
Publication statusPublished - 2011

Keywords

  • METIS-277895

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