Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski; S. Bruijn; A.R. Khorsand; E. Louis; R.W.E. van de Kruijs; T. Burian; J. Chalupsky; J. Cihelka; Michael Gleeson; J. Grzonka; E.M. Gullikson; V. Hajkova; S. Hau-Riege; L. Juha; M. Jurek; D. Klinger; J. Krzywinski; R. London; J.B. Pelka; T. Plocinski; M. Rasinski; K. Tiedtke; S. Toleikis; L. Vysin; H. Wabnitz; F. Bijkerk

doi:10.1364/OE.19.000193

Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

R. Sobierajski, S. Bruijn, A.R. Khorsand, E. Louis, R.W.E. van de Kruijs, T. Burian, J. Chalupsky, J. Cihelka, Michael Gleeson, J. Grzonka, E.M. Gullikson, V. Hajkova, S. Hau-Riege, L. Juha, M. Jurek, D. Klinger, J. Krzywinski, R. London, J.B. Pelka, T. PlocinskiM. Rasinski, K. Tiedtke, S. Toleikis, L. Vysin, H. Wabnitz, F. Bijkerk

Laser Physics & Nonlinear Optics

Research output: Contribution to journal › Article › Academic › peer-review

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Original language	English
Pages (from-to)	193-205
Journal	Optics express
Volume	19
Issue number	1
DOIs	https://doi.org/10.1364/OE.19.000193
Publication status	Published - 2011

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10.1364/OE.19.000193Licence: CC BY

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Sobierajski, R., Bruijn, S., Khorsand, A. R., Louis, E., van de Kruijs, R. W. E., Burian, T., Chalupsky, J., Cihelka, J., Gleeson, M., Grzonka, J., Gullikson, E. M., Hajkova, V., Hau-Riege, S., Juha, L., Jurek, M., Klinger, D., Krzywinski, J., London, R., Pelka, J. B., ... Bijkerk, F. (2011). Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources. Optics express, 19(1), 193-205. https://doi.org/10.1364/OE.19.000193

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title = "Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources",

author = "R. Sobierajski and S. Bruijn and A.R. Khorsand and E. Louis and {van de Kruijs}, R.W.E. and T. Burian and J. Chalupsky and J. Cihelka and Michael Gleeson and J. Grzonka and E.M. Gullikson and V. Hajkova and S. Hau-Riege and L. Juha and M. Jurek and D. Klinger and J. Krzywinski and R. London and J.B. Pelka and T. Plocinski and M. Rasinski and K. Tiedtke and S. Toleikis and L. Vysin and H. Wabnitz and F. Bijkerk",

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doi = "10.1364/OE.19.000193",

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Sobierajski, R, Bruijn, S, Khorsand, AR, Louis, E , van de Kruijs, RWE, Burian, T, Chalupsky, J, Cihelka, J, Gleeson, M, Grzonka, J, Gullikson, EM, Hajkova, V, Hau-Riege, S, Juha, L, Jurek, M, Klinger, D, Krzywinski, J, London, R, Pelka, JB, Plocinski, T, Rasinski, M, Tiedtke, K, Toleikis, S, Vysin, L, Wabnitz, H & Bijkerk, F 2011, 'Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources', Optics express, vol. 19, no. 1, pp. 193-205. https://doi.org/10.1364/OE.19.000193

TY - JOUR

T1 - Damage mechanisms of MoN/SiN multilayer optics for next-generation pulsed XUV light sources

AU - Sobierajski, R.

AU - Bruijn, S.

AU - Khorsand, A.R.

AU - Louis, E.

AU - van de Kruijs, R.W.E.

AU - Burian, T.

AU - Chalupsky, J.

AU - Cihelka, J.

AU - Gleeson, Michael

AU - Grzonka, J.

AU - Gullikson, E.M.

AU - Hajkova, V.

AU - Hau-Riege, S.

AU - Juha, L.

AU - Jurek, M.

AU - Klinger, D.

AU - Krzywinski, J.

AU - London, R.

AU - Pelka, J.B.

AU - Plocinski, T.

AU - Rasinski, M.

AU - Tiedtke, K.

AU - Toleikis, S.

AU - Vysin, L.

AU - Wabnitz, H.

AU - Bijkerk, F.

PY - 2011

Y1 - 2011

U2 - 10.1364/OE.19.000193

DO - 10.1364/OE.19.000193

M3 - Article

SN - 1094-4087

VL - 19

SP - 193

EP - 205

JO - Optics express

JF - Optics express

IS - 1

ER -