Abstract
In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 |
| Place of Publication | Utrecht, The Netherlands |
| Publisher | STW |
| Pages | 616-621 |
| Number of pages | 6 |
| ISBN (Print) | 90-73461-33-2 |
| Publication status | Published - 2002 |
| Event | Semiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands Duration: 29 Nov 2002 → 30 Nov 2002 |
Workshop
| Workshop | Semiconductor Sensor and Actuator Technology, SeSens 2002 |
|---|---|
| Country/Territory | Netherlands |
| City | Veldhoven |
| Period | 29/11/02 → 30/11/02 |
Keywords
- Electrostatic discharge
- Thin film transistor
- Finger print
- Amorphous silicon