Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo, T. Jenneboer, T. Mouthaan

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

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    Abstract

    In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.
    Original languageEnglish
    Title of host publicationProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Place of PublicationUtrecht, The Netherlands
    PublisherSTW
    Pages616-621
    Number of pages6
    ISBN (Print)90-73461-33-2
    Publication statusPublished - 2002
    EventSemiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands
    Duration: 29 Nov 200230 Nov 2002

    Workshop

    WorkshopSemiconductor Sensor and Actuator Technology, SeSens 2002
    Country/TerritoryNetherlands
    CityVeldhoven
    Period29/11/0230/11/02

    Keywords

    • Electrostatic discharge
    • Thin film transistor
    • Finger print
    • Amorphous silicon

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