Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo-Tosic, Antonius J.S.M. Jenneboer, A.J. Mouthaan

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    In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.
    Original languageUndefined
    Number of pages6
    Publication statusPublished - 29 Nov 2002
    EventProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 - Veldhoven, The Netherlands
    Duration: 29 Nov 200229 Nov 2002


    ConferenceProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Other29 Nov 2002


    • electrostatic discharge
    • thin film transistor
    • Finger print
    • IR-67503
    • Amorphous silicon
    • EWI-15586

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