Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo-Tosic, Antonius J.S.M. Jenneboer, A.J. Mouthaan

    Research output: Contribution to conferencePaperAcademic

    1 Downloads (Pure)

    Abstract

    In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.
    Original languageUndefined
    Pages616-621
    Number of pages6
    Publication statusPublished - 29 Nov 2002
    EventProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 - Veldhoven, The Netherlands
    Duration: 29 Nov 200229 Nov 2002

    Conference

    ConferenceProceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
    Period29/11/0229/11/02
    Other29 Nov 2002

    Keywords

    • electrostatic discharge
    • thin film transistor
    • Finger print
    • IR-67503
    • Amorphous silicon
    • EWI-15586

    Cite this