Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo-Tosic; Antonius J.S.M. Jenneboer; A.J. Mouthaan

Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo-Tosic, Antonius J.S.M. Jenneboer, A.J. Mouthaan

Research output: Contribution to conference › Paper › Academic

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Abstract

In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

Original language	Undefined
Pages	616-621
Number of pages	6
Publication status	Published - 29 Nov 2002
Event	Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002 - Veldhoven, The Netherlands Duration: 29 Nov 2002 → 29 Nov 2002

Conference

Conference	Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
Period	29/11/02 → 29/11/02
Other	29 Nov 2002

Keywords

electrostatic discharge
thin film transistor
Finger print
IR-67503
Amorphous silicon
EWI-15586

Access to Document

http://eprints.eemcs.utwente.nl/secure2/15586/01/golo.pdf

Cite this

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title = "Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology",

abstract = "In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.",

keywords = "electrostatic discharge, thin film transistor, Finger print, IR-67503, Amorphous silicon, EWI-15586",

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year = "2002",

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T1 - Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

AU - Golo-Tosic, N.

AU - Jenneboer, Antonius J.S.M.

AU - Mouthaan, A.J.

PY - 2002/11/29

Y1 - 2002/11/29

N2 - In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

AB - In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

KW - electrostatic discharge

KW - thin film transistor

KW - Finger print

KW - IR-67503

KW - Amorphous silicon

KW - EWI-15586

M3 - Paper

SP - 616

EP - 621

Y2 - 29 November 2002 through 29 November 2002

ER -