Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo; T. Jenneboer; T. Mouthaan

Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

N. Golo, T. Jenneboer, T. Mouthaan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

Original language	English
Title of host publication	Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002
Place of Publication	Utrecht, The Netherlands
Publisher	STW
Pages	616-621
Number of pages	6
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	Semiconductor Sensor and Actuator Technology, SeSens 2002 - Veldhoven, Netherlands Duration: 29 Nov 2002 → 30 Nov 2002

Workshop

Workshop	Semiconductor Sensor and Actuator Technology, SeSens 2002
Country/Territory	Netherlands
City	Veldhoven
Period	29/11/02 → 30/11/02

Keywords

Electrostatic discharge
Thin film transistor
Finger print
Amorphous silicon

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Golo2002dealingFinal published version, 747 KB

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title = "Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology",

abstract = "In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.",

keywords = "Electrostatic discharge, Thin film transistor, Finger print, Amorphous silicon",

author = "N. Golo and T. Jenneboer and T. Mouthaan",

year = "2002",

language = "English",

isbn = "90-73461-33-2",

pages = "616--621",

booktitle = "Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002",

publisher = "STW",

note = "Semiconductor Sensor and Actuator Technology, SeSens 2002 ; Conference date: 29-11-2002 Through 30-11-2002",

}

Golo, N, Jenneboer, T & Mouthaan, T 2002, Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology. in Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. STW, Utrecht, The Netherlands, pp. 616-621, Semiconductor Sensor and Actuator Technology, SeSens 2002, Veldhoven, Netherlands, 29/11/02.

Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology. / Golo, N.; Jenneboer, T.; Mouthaan, T.

Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002. Utrecht, The Netherlands : STW, 2002. p. 616-621.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

AU - Golo, N.

AU - Jenneboer, T.

AU - Mouthaan, T.

PY - 2002

Y1 - 2002

N2 - In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

AB - In this paper a capacitive fingerprint sensor will be presented with ESD related considerations. The sensor is developed in our laboratory. The manufacturing process will be explained. The behavior under ESD stress will be analyzed. A solution for ESD protection will be proposed.

KW - Electrostatic discharge

KW - Thin film transistor

KW - Finger print

KW - Amorphous silicon

M3 - Conference contribution

SN - 90-73461-33-2

SP - 616

EP - 621

BT - Proceedings of Semiconductor Sensor and Actuator Technology SeSens 2002

PB - STW

CY - Utrecht, The Netherlands

T2 - Semiconductor Sensor and Actuator Technology, SeSens 2002

Y2 - 29 November 2002 through 30 November 2002

ER -

Dealing with electrostatic discharge in a capacitive fingerprint sensor fabricated in amorphous silicon thin film technology

Abstract

Workshop

Keywords

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Fingerprint

Cite this