DEEMO: a new technology for the fabrication of microstructures

J. Elders, Henricus V. Jansen, Michael Curt Elwenspoek, W. Ehrfeld

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    43 Citations (Scopus)
    228 Downloads (Pure)

    Abstract

    The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Pages238-243
    Number of pages6
    ISBN (Print)0-7803-2503-6
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995

    Workshop

    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS
    CountryNetherlands
    CityAmsterdam
    Period29/01/952/02/95

    Keywords

    • EWI-13883
    • METIS-114119
    • IR-17224

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