DEEMO: a new technology for the fabrication of microstructures

J. Elders, Henricus V. Jansen, Michael Curt Elwenspoek, W. Ehrfeld

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    The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.
    Original languageUndefined
    Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
    Place of PublicationPiscataway
    PublisherIEEE Computer Society
    Number of pages6
    ISBN (Print)0-7803-2503-6
    Publication statusPublished - 29 Jan 1995
    EventIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands
    Duration: 29 Jan 19952 Feb 1995


    WorkshopIEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
    Abbreviated titleMEMS


    • EWI-13883
    • METIS-114119
    • IR-17224

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