Deemo: a new technology for the fabrication of microstructures

J. Elders, Henricus V. Jansen, Michael Curt Elwenspoek

    Research output: Other contribution › Other research output

    Original languageUndefined
    Place of PublicationAmsterdam
    Publication statusPublished - 29 Jan 1995

    Keywords

    • METIS-114936

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