DEEMO: a new technology for the fabrication of microstructures

J. Elders; Henricus V. Jansen; Michael Curt Elwenspoek; W. Ehrfeld

DEEMO: a new technology for the fabrication of microstructures

J. Elders
, Henricus V. Jansen
, Michael Curt Elwenspoek
, W. Ehrfeld

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

46 Citations (Scopus)

557 Downloads (Pure)

Abstract

The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.

Original language	Undefined
Title of host publication	Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Place of Publication	Piscataway
Publisher	IEEE
Pages	238-243
Number of pages	6
ISBN (Print)	0-7803-2503-6
Publication status	Published - 29 Jan 1995
Event	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 - Amsterdam, Netherlands Duration: 29 Jan 1995 → 2 Feb 1995

Workshop

Workshop	IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995
Abbreviated title	MEMS
Country/Territory	Netherlands
City	Amsterdam
Period	29/01/95 → 2/02/95

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

EWI-13883
METIS-114119
IR-17224

Access to Document

http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=472573

Cite this

@inproceedings{3f9cf2d0d4ba428bb4d3a0249c81ffe3,

title = "DEEMO: a new technology for the fabrication of microstructures",

abstract = "The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.",

keywords = "EWI-13883, METIS-114119, IR-17224",

author = "J. Elders and Jansen, \{Henricus V.\} and Elwenspoek, \{Michael Curt\} and W. Ehrfeld",

year = "1995",

month = jan,

day = "29",

language = "Undefined",

isbn = "0-7803-2503-6",

pages = "238--243",

booktitle = "Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)",

publisher = "IEEE",

address = "United States",

note = "IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995 ; Conference date: 29-01-1995 Through 02-02-1995",

}

Elders, J, Jansen, HV, Elwenspoek, MC & Ehrfeld, W 1995, DEEMO: a new technology for the fabrication of microstructures. in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS). IEEE, Piscataway, pp. 238-243, IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995, Amsterdam, Netherlands, 29/01/95. <http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=472573>

TY - GEN

T1 - DEEMO: a new technology for the fabrication of microstructures

AU - Elders, J.

AU - Jansen, Henricus V.

AU - Elwenspoek, Michael Curt

AU - Ehrfeld, W.

PY - 1995/1/29

Y1 - 1995/1/29

N2 - The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.

AB - The recent innovations in dry etching make it a promising technology for the fabrications of micromoulds. The high aspect ratios, directional freedom, low roughness, high etch rates and high selectivity with respect to the mask material allow a versatile fabrication process of micromoulds for subsequent electroplating and embossing, as is demonstrated with the DEEMO process. DEEMO is an English acronym and stands for Dry Etching, Electroplating and Moulding.

KW - EWI-13883

KW - METIS-114119

KW - IR-17224

M3 - Conference contribution

SN - 0-7803-2503-6

SP - 238

EP - 243

BT - Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

PB - IEEE

CY - Piscataway

T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1995

Y2 - 29 January 1995 through 2 February 1995

ER -