Abstract
The elastic deflection of a comb drive tooth in an electrostatic field is considered. The tooth can be symmetrically located between two rigid teeth of the matching comb, in which case the problem reduces to a pure bifurcation problem for which the critical voltage can be determined. Alternatively, due to an ap- proximate straight-line mechanism, the tooth can have a uniform initial lateral displacement and a smooth curve of equilibria is found which has a limit point, after which pull-in occurs. An assumed deflection shape and a series expansion of the electrostatic capacity yield the
deflection curves for the case with a uniform initial lateral displacement. This shows that pull-in
occurs at a voltage that is reduced by a factor that is about pro- portional to the two-third power of the relative lateral initial dis- placement. The theoretical results have been experimentally tested. The results show a qualitative agreement, but the experimental de- flections are larger and the pull-in voltages are lower. These differences can be explained from neglected fringe fields and de- viations from the nominal shape.
Original language | English |
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Title of host publication | Proceedings of the ASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013 |
Subtitle of host publication | August 4-7, 2013, Portland, Oregon, USA |
Publisher | American Society of Mechanical Engineers (ASME) |
Pages | 1-7 |
Number of pages | 7 |
ISBN (Print) | 978-0-7918-5593-5 |
DOIs | |
Publication status | Published - 4 Aug 2013 |
Event | ASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013 - Portland, United States Duration: 4 Aug 2013 → 7 Aug 2013 |
Conference
Conference | ASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013 |
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Abbreviated title | IDETC/CIE |
Country | United States |
City | Portland |
Period | 4/08/13 → 7/08/13 |
Keywords
- METIS-298992
- IR-87903