Deflection of an eccentric tooth of a comb drive in an electrostatic field

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Abstract

The elastic deflection of a comb drive tooth in an electrostatic field is considered. The tooth can be symmetrically located between two rigid teeth of the matching comb, in which case the problem reduces to a pure bifurcation problem for which the critical voltage can be determined. Alternatively, due to an ap- proximate straight-line mechanism, the tooth can have a uniform initial lateral displacement and a smooth curve of equilibria is found which has a limit point, after which pull-in occurs. An assumed deflection shape and a series expansion of the electrostatic capacity yield the deflection curves for the case with a uniform initial lateral displacement. This shows that pull-in occurs at a voltage that is reduced by a factor that is about pro- portional to the two-third power of the relative lateral initial dis- placement. The theoretical results have been experimentally tested. The results show a qualitative agreement, but the experimental de- flections are larger and the pull-in voltages are lower. These differences can be explained from neglected fringe fields and de- viations from the nominal shape.
Original languageEnglish
Title of host publicationProceedings of the ASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013
Subtitle of host publicationAugust 4-7, 2013, Portland, Oregon, USA
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages1-7
Number of pages7
ISBN (Print) 978-0-7918-5593-5
DOIs
Publication statusPublished - 4 Aug 2013
EventASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013 - Portland, United States
Duration: 4 Aug 20137 Aug 2013

Conference

ConferenceASME 2013 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference, IDETC/CIE 2013
Abbreviated titleIDETC/CIE
CountryUnited States
CityPortland
Period4/08/137/08/13

Keywords

  • METIS-298992
  • IR-87903

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