Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 21 Jan 2014
EventPhysics@FOM Veldhoven 2014 - Veldhoven, Netherlands
Duration: 21 Jan 201422 Jan 2014

Conference

ConferencePhysics@FOM Veldhoven 2014
CountryNetherlands
CityVeldhoven
Period21/01/1422/01/14

Keywords

  • METIS-303654

Cite this

van den Bos, R. A. J. M., Lee, C. J., & Bijkerk, F. (2014). Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering. -. Poster session presented at Physics@FOM Veldhoven 2014, Veldhoven, Netherlands.
van den Bos, R.A.J.M. ; Lee, Christopher James ; Bijkerk, Frederik. / Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering. Poster session presented at Physics@FOM Veldhoven 2014, Veldhoven, Netherlands.
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year = "2014",
month = "1",
day = "21",
language = "English",
pages = "--",
note = "Physics@FOM Veldhoven 2014 ; Conference date: 21-01-2014 Through 22-01-2014",

}

van den Bos, RAJM, Lee, CJ & Bijkerk, F 2014, 'Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering' Physics@FOM Veldhoven 2014, Veldhoven, Netherlands, 21/01/14 - 22/01/14, pp. -.

Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering. / van den Bos, R.A.J.M.; Lee, Christopher James; Bijkerk, Frederik.

2014. - Poster session presented at Physics@FOM Veldhoven 2014, Veldhoven, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

AU - van den Bos, R.A.J.M.

AU - Lee, Christopher James

AU - Bijkerk, Frederik

PY - 2014/1/21

Y1 - 2014/1/21

KW - METIS-303654

M3 - Poster

SP - -

ER -

van den Bos RAJM, Lee CJ, Bijkerk F. Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering. 2014. Poster session presented at Physics@FOM Veldhoven 2014, Veldhoven, Netherlands.