Degradation of extreme ultraviolet multilayer mirrors due to H-induced blistering

R.A.J.M. van den Bos, Christopher James Lee, Frederik Bijkerk

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Pages-
Publication statusPublished - 21 Jan 2014
EventPhysics@FOM Veldhoven 2014 - Veldhoven, Netherlands
Duration: 21 Jan 201422 Jan 2014

Conference

ConferencePhysics@FOM Veldhoven 2014
CountryNetherlands
CityVeldhoven
Period21/01/1422/01/14

Keywords

  • METIS-303654

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