Dependency of Dishing on Polish Time and Slurry Chemistry in Cu-CMP

V. Nguyen Hoang, H. van Kranenburg, P.H. Woerlee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	European Workshop Materials for Advanced Metallization
Place of Publication	Oostende, Belgium
Pages	164-165
Number of pages	2
Publication status	Published - 8 Mar 1999

Keywords

@inproceedings{7ccd1fee26574a02a38f170a222e5b1e,

title = "Dependency of Dishing on Polish Time and Slurry Chemistry in Cu-CMP",

keywords = "METIS-113904",

author = "{Nguyen Hoang}, V. and {van Kranenburg}, H. and P.H. Woerlee",

year = "1999",

month = mar,

day = "8",

language = "Undefined",

pages = "164--165",

booktitle = "European Workshop Materials for Advanced Metallization",

}