Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia

Sourish Banerjee, Antonius A.I. Aarnink, Gerhardus A.M. Kip, Dirk J Gravesteijn, Jurriaan Schmitz, Alexeij Y. Kovalgin

    Research output: Contribution to conference › Paper

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