Deposition of thin layers containing Ga, C and N by sequential pulses of Trimethylgallium and Ammonia
- Sourish Banerjee
- , Antonius A.I. Aarnink
- , Gerhardus A.M. Kip
- , Dirk J Gravesteijn
- , Jurriaan Schmitz
- , Alexeij Y. Kovalgin
Research output: Contribution to conference › Paper
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