Abstract
The design and characterization of integrated passive elements on high ohmic silicon was presented. The excellent results were obtained for the coplanar waveguides and Marchand baluns for Ka-band applications. It was shown that the losses for integrated passives were comparable with state-of-the-art GaAs implementations.
Original language | English |
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Pages (from-to) | 1235-1238 |
Number of pages | 4 |
Journal | IEEE MTT-S International Microwave Symposium Digest |
Volume | 2 |
DOIs | |
Publication status | Published - 18 Aug 2003 |
Event | 2003 IEEE MTT-S International Microwave Symposium - Philadelphia, United States Duration: 8 Jun 2003 → 13 Jun 2003 |