Abstract
A scaled-up version of a MEMS based six degrees-of-freedom precision manipulator
has been designed and built. A model necessary for control purposes was validated with experiments. These experiments show a great resemblance between model and mechanism. A closed loop control system with feedforward has been designed and implemented which resulted in a tracking error according to the specifications
Original language | Undefined |
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Title of host publication | Proceedings of the 9th Euspen International Conference 2009 |
Place of Publication | San Sebastian, Spain |
Pages | 357-360 |
Publication status | Published - 2 Jun 2009 |
Event | 9th EUSPEN International Conference 2009 - Kursaal Congress Centre, San Sebastian, Spain Duration: 2 May 2009 → 5 May 2009 Conference number: 9 |
Publication series
Name | |
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Volume | I. |
Conference
Conference | 9th EUSPEN International Conference 2009 |
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Abbreviated title | EUSPEN |
Country/Territory | Spain |
City | San Sebastian |
Period | 2/05/09 → 5/05/09 |
Keywords
- METIS-257957
- IR-89593