Abstract
A scaled-up version of a MEMS based six degrees-of-freedom precision manipulator
has been designed and built. A model necessary for control purposes was validated with experiments. These experiments show a great resemblance between model and mechanism. A closed loop control system with feedforward has been designed and implemented which resulted in a tracking error according to the specifications
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 9th Euspen International Conference of the European Society for Precision Engineering and Nanotechnology2009 |
| Subtitle of host publication | June 2nd - June 5th 2009, San Sebastian, Spain |
| Editors | H. Van Brussel, E. Brinksmeier, H. Spaan, T. Burke, D. Nyman |
| Place of Publication | San Sebastian, Spain |
| Publisher | EUSPEN |
| Pages | 357-360 |
| Volume | I |
| ISBN (Print) | 978-0-9553082-6-0 |
| Publication status | Published - 2 Jun 2009 |
| Event | 9th EUSPEN International Conference 2009 - Kursaal Congress Centre, San Sebastian, Spain Duration: 2 May 2009 → 5 May 2009 Conference number: 9 |
Conference
| Conference | 9th EUSPEN International Conference 2009 |
|---|---|
| Abbreviated title | EUSPEN |
| Country/Territory | Spain |
| City | San Sebastian |
| Period | 2/05/09 → 5/05/09 |