@inproceedings{a5ffaebab12b4d5d86853ac0cda6e161,
title = "Design and control of laser micromachining workstation",
abstract = "The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.",
keywords = "n/a OA procedure",
author = "Edin Golubovic and Khalil, {Islam S.M.} and Nergiz, {Ahmet O.} and Baran, {Eray A.} and Asif Sabanovic",
year = "2012",
doi = "10.1109/AMC.2012.6197037",
language = "English",
isbn = "978-1-4577-1072-8",
series = "IEEE International Workshop on Advanced Motion Control (AMC)",
publisher = "IEEE",
booktitle = "12th IEEE International Workshop on Advanced Motion Control, AMC 2012",
address = "United States",
note = "2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012 ; Conference date: 25-03-2012 Through 27-03-2012",
}