Design and control of laser micromachining workstation

Edin Golubovic; Islam S.M. Khalil; Ahmet O. Nergiz; Eray A. Baran; Asif Sabanovic

doi:10.1109/AMC.2012.6197037

Design and control of laser micromachining workstation

Edin Golubovic^*
, Islam S.M. Khalil
, Ahmet O. Nergiz
, Eray A. Baran
, Asif Sabanovic

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

4 Citations (Scopus)

Abstract

The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.

Original language	English
Title of host publication	12th IEEE International Workshop on Advanced Motion Control, AMC 2012
Place of Publication	Piscataway, NJ
Publisher	IEEE
Number of pages	6
ISBN (Electronic)	978-1-4577-1071-1, 978-1-4577-1073-5
ISBN (Print)	978-1-4577-1072-8
DOIs	https://doi.org/10.1109/AMC.2012.6197037
Publication status	Published - 2012
Externally published	Yes
Event	2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012 - Sarajevo, Bosnia and Herzegovina Duration: 25 Mar 2012 → 27 Mar 2012

Publication series

Name	IEEE International Workshop on Advanced Motion Control (AMC)
Publisher	IEEE
Volume	2012
ISSN (Print)	1943-6572
ISSN (Electronic)	1943-6580

Conference

Conference	2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012
Country/Territory	Bosnia and Herzegovina
City	Sarajevo
Period	25/03/12 → 27/03/12

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

n/a OA procedure

Access to Document

10.1109/AMC.2012.6197037

Cite this

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title = "Design and control of laser micromachining workstation",

abstract = "The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.",

keywords = "n/a OA procedure",

author = "Edin Golubovic and Khalil, \{Islam S.M.\} and Nergiz, \{Ahmet O.\} and Baran, \{Eray A.\} and Asif Sabanovic",

year = "2012",

doi = "10.1109/AMC.2012.6197037",

language = "English",

isbn = "978-1-4577-1072-8",

series = "IEEE International Workshop on Advanced Motion Control (AMC)",

publisher = "IEEE",

booktitle = "12th IEEE International Workshop on Advanced Motion Control, AMC 2012",

address = "United States",

note = "2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012 ; Conference date: 25-03-2012 Through 27-03-2012",

}

Golubovic, E, Khalil, ISM, Nergiz, AO, Baran, EA & Sabanovic, A 2012, Design and control of laser micromachining workstation. in 12th IEEE International Workshop on Advanced Motion Control, AMC 2012., 6197037, IEEE International Workshop on Advanced Motion Control (AMC), vol. 2012, IEEE, Piscataway, NJ, 2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012, Sarajevo, Bosnia and Herzegovina, 25/03/12. https://doi.org/10.1109/AMC.2012.6197037

Design and control of laser micromachining workstation. / Golubovic, Edin; Khalil, Islam S.M.; Nergiz, Ahmet O. et al.
12th IEEE International Workshop on Advanced Motion Control, AMC 2012. Piscataway, NJ: IEEE, 2012. 6197037 (IEEE International Workshop on Advanced Motion Control (AMC); Vol. 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design and control of laser micromachining workstation

AU - Golubovic, Edin

AU - Khalil, Islam S.M.

AU - Nergiz, Ahmet O.

AU - Baran, Eray A.

AU - Sabanovic, Asif

PY - 2012

Y1 - 2012

N2 - The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.

AB - The production process of miniature devices and microsystems requires the utilization of non-conventional micromachining techniques. In the past few decades laser micromachining has became micro-manufacturing technique of choice for many industrial and research applications. This paper discusses the design of motion control system for a laser micromachining workstation with particulars about automatic focusing and control of work platform used in the workstation. The automatic focusing is solved in a sliding mode optimization framework and preview controller is used to control the motion platform. Experimental results of both motion control and actual laser micromachining are presented.

KW - n/a OA procedure

UR - https://www.scopus.com/pages/publications/84861642406

U2 - 10.1109/AMC.2012.6197037

DO - 10.1109/AMC.2012.6197037

M3 - Conference contribution

AN - SCOPUS:84861642406

SN - 978-1-4577-1072-8

T3 - IEEE International Workshop on Advanced Motion Control (AMC)

BT - 12th IEEE International Workshop on Advanced Motion Control, AMC 2012

PB - IEEE

CY - Piscataway, NJ

T2 - 2012 12th IEEE International Workshop on Advanced Motion Control, AMC 2012

Y2 - 25 March 2012 through 27 March 2012

ER -

Design and control of laser micromachining workstation

Abstract

Publication series

Conference

UN SDGs

Keywords

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