Design and fabrication of stable capacitive test structures to study charge trapping phenomena

M.C. van Essen, Remco J. Wiegerink, L.J. Fernandez, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePaper

    Original languageEnglish
    Pages296-299
    Number of pages4
    Publication statusPublished - 4 Sep 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    CountrySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • METIS-228578

    Cite this

    van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H., & Flokstra, J. (2005). Design and fabrication of stable capacitive test structures to study charge trapping phenomena. 296-299. Paper presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.
    van Essen, M.C. ; Wiegerink, Remco J. ; Fernandez, L.J. ; Rogalla, Horst ; Flokstra, Jakob. / Design and fabrication of stable capacitive test structures to study charge trapping phenomena. Paper presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.4 p.
    @conference{f00e84c2ae9349ec865190daf98511e6,
    title = "Design and fabrication of stable capacitive test structures to study charge trapping phenomena",
    keywords = "METIS-228578",
    author = "{van Essen}, M.C. and Wiegerink, {Remco J.} and L.J. Fernandez and Horst Rogalla and Jakob Flokstra",
    year = "2005",
    month = "9",
    day = "4",
    language = "English",
    pages = "296--299",
    note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

    }

    van Essen, MC, Wiegerink, RJ, Fernandez, LJ, Rogalla, H & Flokstra, J 2005, 'Design and fabrication of stable capacitive test structures to study charge trapping phenomena' Paper presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05 - 6/09/05, pp. 296-299.

    Design and fabrication of stable capacitive test structures to study charge trapping phenomena. / van Essen, M.C.; Wiegerink, Remco J.; Fernandez, L.J.; Rogalla, Horst; Flokstra, Jakob.

    2005. 296-299 Paper presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.

    Research output: Contribution to conferencePaper

    TY - CONF

    T1 - Design and fabrication of stable capacitive test structures to study charge trapping phenomena

    AU - van Essen, M.C.

    AU - Wiegerink, Remco J.

    AU - Fernandez, L.J.

    AU - Rogalla, Horst

    AU - Flokstra, Jakob

    PY - 2005/9/4

    Y1 - 2005/9/4

    KW - METIS-228578

    M3 - Paper

    SP - 296

    EP - 299

    ER -

    van Essen MC, Wiegerink RJ, Fernandez LJ, Rogalla H, Flokstra J. Design and fabrication of stable capacitive test structures to study charge trapping phenomena. 2005. Paper presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.