Design and fabrication of stable capacitive test structures to study charge trapping phenomena

M.C. van Essen, Remco J. Wiegerink, L.J. Fernandez, Horst Rogalla, Jakob Flokstra

Research output: Contribution to conference › Paper

Original language	English
Pages	296-299
Number of pages	4
Publication status	Published - 4 Sept 2005
Event	16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden Duration: 4 Sept 2005 → 6 Sept 2005 Conference number: 16

Workshop	16th MicroMechanics Europe Workshop, MME 2005
Abbreviated title	MME
Country/Territory	Sweden
City	Göteborg
Period	4/09/05 → 6/09/05

Keywords

@conference{f00e84c2ae9349ec865190daf98511e6,

title = "Design and fabrication of stable capacitive test structures to study charge trapping phenomena",

keywords = "METIS-228578",

author = "{van Essen}, M.C. and Wiegerink, {Remco J.} and L.J. Fernandez and Horst Rogalla and Jakob Flokstra",

year = "2005",

month = sep,

day = "4",

language = "English",

pages = "296--299",

note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

}

TY - CONF

T1 - Design and fabrication of stable capacitive test structures to study charge trapping phenomena

AU - van Essen, M.C.

AU - Wiegerink, Remco J.

AU - Fernandez, L.J.

AU - Rogalla, Horst

AU - Flokstra, Jakob

N1 - Conference code: 16

PY - 2005/9/4

Y1 - 2005/9/4

KW - METIS-228578

M3 - Paper

SP - 296

EP - 299

T2 - 16th MicroMechanics Europe Workshop, MME 2005

Y2 - 4 September 2005 through 6 September 2005

ER -