Design and fabrication of stable capacitive test structures to study charge trapping phenomena

M.C. van Essen, Remco J. Wiegerink, L.J. Fernandez, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePaper

    Original languageEnglish
    Pages296-299
    Number of pages4
    Publication statusPublished - 4 Sept 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sept 20056 Sept 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    Country/TerritorySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • METIS-228578

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