Design and fabrication of stable capacitive test structures to study charge trapping phenomena

M.C. van Essen, Remco J. Wiegerink, L.J. Fernandez, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 4 Sep 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    CountrySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • METIS-228575

    Cite this

    van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H., & Flokstra, J. (2005). Design and fabrication of stable capacitive test structures to study charge trapping phenomena. Poster session presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.