Design and fabrication of stable capacitive test structures to study charge trapping phenomena

M.C. van Essen, Remco J. Wiegerink, L.J. Fernandez, Horst Rogalla, Jakob Flokstra

    Research output: Contribution to conferencePoster

    Original languageEnglish
    Publication statusPublished - 4 Sep 2005
    Event16th MicroMechanics Europe Workshop, MME 2005 - Göteborg, Sweden
    Duration: 4 Sep 20056 Sep 2005
    Conference number: 16

    Workshop

    Workshop16th MicroMechanics Europe Workshop, MME 2005
    Abbreviated titleMME
    CountrySweden
    CityGöteborg
    Period4/09/056/09/05

    Keywords

    • METIS-228575

    Cite this

    van Essen, M. C., Wiegerink, R. J., Fernandez, L. J., Rogalla, H., & Flokstra, J. (2005). Design and fabrication of stable capacitive test structures to study charge trapping phenomena. Poster session presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.
    van Essen, M.C. ; Wiegerink, Remco J. ; Fernandez, L.J. ; Rogalla, Horst ; Flokstra, Jakob. / Design and fabrication of stable capacitive test structures to study charge trapping phenomena. Poster session presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.
    @conference{1fdf96084de4432586af512c34116396,
    title = "Design and fabrication of stable capacitive test structures to study charge trapping phenomena",
    keywords = "METIS-228575",
    author = "{van Essen}, M.C. and Wiegerink, {Remco J.} and L.J. Fernandez and Horst Rogalla and Jakob Flokstra",
    year = "2005",
    month = "9",
    day = "4",
    language = "English",
    note = "16th MicroMechanics Europe Workshop, MME 2005, MME ; Conference date: 04-09-2005 Through 06-09-2005",

    }

    van Essen, MC, Wiegerink, RJ, Fernandez, LJ, Rogalla, H & Flokstra, J 2005, 'Design and fabrication of stable capacitive test structures to study charge trapping phenomena' 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden, 4/09/05 - 6/09/05, .

    Design and fabrication of stable capacitive test structures to study charge trapping phenomena. / van Essen, M.C.; Wiegerink, Remco J.; Fernandez, L.J.; Rogalla, Horst; Flokstra, Jakob.

    2005. Poster session presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.

    Research output: Contribution to conferencePoster

    TY - CONF

    T1 - Design and fabrication of stable capacitive test structures to study charge trapping phenomena

    AU - van Essen, M.C.

    AU - Wiegerink, Remco J.

    AU - Fernandez, L.J.

    AU - Rogalla, Horst

    AU - Flokstra, Jakob

    PY - 2005/9/4

    Y1 - 2005/9/4

    KW - METIS-228575

    M3 - Poster

    ER -

    van Essen MC, Wiegerink RJ, Fernandez LJ, Rogalla H, Flokstra J. Design and fabrication of stable capacitive test structures to study charge trapping phenomena. 2005. Poster session presented at 16th MicroMechanics Europe Workshop, MME 2005, Göteborg, Sweden.