Design and modeling of a precision 6 DOF MEMS-based parallel kinematic TEM sample manipulator

Dannis Michel Brouwer, B.R. de Jong, Herman Soemers

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

2 Citations (Scopus)
37 Downloads (Pure)
Original languageEnglish
Title of host publicationProceedings of the 21st Annual Meeting of the American Society of Precision Engineering (ASPE), 15-20 October 2006 Monterey, California
Editors Unknown ED
Place of PublicationMonterey CA, USA
PublisherAmerican Society for Precision Engineering
Number of pages4
Publication statusPublished - 15 Oct 2006
Event21st ASPE Annual Meeting 2006 - Monterey, United States
Duration: 15 Oct 200620 Oct 2006
Conference number: 21

Publication series

PublisherAmerican Society of Precision Engineering (ASPE)


Conference21st ASPE Annual Meeting 2006
Country/TerritoryUnited States
Internet address


  • METIS-235270
  • IR-89589

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