Abstract
This work presents the design and optimization of a large stroke planar positioning stage in a single-mask MEMS fabrication process. Electrostatic comb-drive actuators were used to control the position and rotation of the 3-DOF stage. Thermal displacement sensors are integrated to provide feedback. Simulations show that we are able to reach a +/-120mm range of motion and +/-30 degrees of rotation.
Preliminary measurements were performed which validated our models.
| Original language | English |
|---|---|
| Title of host publication | Proceedings of the 13th EUSPEN International Conference, Berlin, 27-31 May 2013, vol. 1 |
| Place of Publication | Berlin, Germany |
| Publisher | EUSPEN |
| Pages | 322-325 |
| ISBN (Print) | 978-0-9566790-2-4 |
| Publication status | Published - 27 May 2013 |
| Event | 13th EUSPEN International Conference 2013 - Maritim Hotel, Berlin, Germany Duration: 27 May 2013 → 31 May 2013 Conference number: 13 |
Publication series
| Name | |
|---|---|
| Publisher | EUSPEN |
Conference
| Conference | 13th EUSPEN International Conference 2013 |
|---|---|
| Abbreviated title | EUSPEN |
| Country/Territory | Germany |
| City | Berlin |
| Period | 27/05/13 → 31/05/13 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 3 Good Health and Well-being
Keywords
- IR-89598
- METIS-301842
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