Design and optimization of a 3-DOF planar MEMS stage with integrated thermal position sensors

B. Krijnen, K.R. Swinkels, Dannis Michel Brouwer, Justus Laurens Herder

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

2 Citations (Scopus)
43 Downloads (Pure)

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Engineering & Materials Science