Design and realisation of a quasi monolithic silicon load cell

H. Wensink, Remco J. Wiegerink, A.F. Zwijze, Meint J. de Boer, Michael Curt Elwenspoek

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    In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg. A prototype has been realised. An improved cryogenic RIE process with high aspect ratio was developed for the fabrication of thin springs. Low temperature silicon direct bonding was used for the final assembly. The mechanical structure was tested using poly silicon strain gauges. Encapsulated resonant strain gauges [1] will be used in the final design in order to obtain the desired accuracy of 0.03%.
    Original languageUndefined
    Title of host publicationProceedings of the Micromechanics Europe 1998 Conference (MME)
    Place of PublicationUlvik, Norway
    Publication statusPublished - 3 Jun 1998
    Event9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway
    Duration: 3 Jun 19985 Jun 1998
    Conference number: 9


    Conference9th Micromechanics Europe Workshop, MME 1998
    Abbreviated titleMME


    • IR-25570
    • METIS-130372

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