Abstract
In this paper, the first silicon load cell is presented designed for measuring a load up to 1000 kg. A prototype has been realised. An improved cryogenic RIE process with high aspect ratio was developed for the fabrication of thin springs. Low temperature silicon direct bonding was used for the final assembly. The mechanical structure was tested using poly silicon strain gauges. Encapsulated resonant strain gauges [1] will be used in the final design in order to obtain the desired accuracy of 0.03%.
Original language | Undefined |
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Title of host publication | Proceedings of the Micromechanics Europe 1998 Conference (MME) |
Place of Publication | Ulvik, Norway |
Pages | 190-193 |
Publication status | Published - 3 Jun 1998 |
Event | 9th Micromechanics Europe Workshop, MME 1998 - Ulvik, Norway Duration: 3 Jun 1998 → 5 Jun 1998 Conference number: 9 |
Conference
Conference | 9th Micromechanics Europe Workshop, MME 1998 |
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Abbreviated title | MME |
Country/Territory | Norway |
City | Ulvik |
Period | 3/06/98 → 5/06/98 |
Keywords
- IR-25570
- METIS-130372