Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
Original languageUndefined
Title of host publicationProceedings of the 2000 IMECE MEMS Symposium of the ASME International
Place of PublicationOrlando, USA
Pages-
Number of pages6
Publication statusPublished - 5 Nov 2000
Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
Duration: 23 Jan 200027 Jan 2000
Conference number: 13

Conference

Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated titleMEMS
CountryJapan
CityMiyazaki
Period23/01/0027/01/00

Keywords

  • IR-16247
  • METIS-113132

Cite this

Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Tong, D. H., & Elwenspoek, M. C. (2000). Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In Proceedings of the 2000 IMECE MEMS Symposium of the ASME International (pp. -). Orlando, USA.
Zwijze, A.F. ; Wiegerink, Remco J. ; Krijnen, Gijsbertus J.M. ; Tong, D.H. ; Elwenspoek, Michael Curt. / Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, 2000. pp. -
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title = "Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg",
abstract = "In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 {\%} of full-scale. Creep at 500 kg after 30 minutes is within 0.01 {\%}. These measurements show that the performance has improved by a factor of 10 compared to the previous design.",
keywords = "IR-16247, METIS-113132",
author = "A.F. Zwijze and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and D.H. Tong and Elwenspoek, {Michael Curt}",
year = "2000",
month = "11",
day = "5",
language = "Undefined",
pages = "--",
booktitle = "Proceedings of the 2000 IMECE MEMS Symposium of the ASME International",

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Zwijze, AF, Wiegerink, RJ, Krijnen, GJM, Tong, DH & Elwenspoek, MC 2000, Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. in Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, pp. -, 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, Miyazaki, Japan, 23/01/00.

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Tong, D.H.; Elwenspoek, Michael Curt.

Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, 2000. p. -.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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T1 - Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Tong, D.H.

AU - Elwenspoek, Michael Curt

PY - 2000/11/5

Y1 - 2000/11/5

N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

KW - IR-16247

KW - METIS-113132

M3 - Conference contribution

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BT - Proceedings of the 2000 IMECE MEMS Symposium of the ASME International

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Zwijze AF, Wiegerink RJ, Krijnen GJM, Tong DH, Elwenspoek MC. Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA. 2000. p. -