Abstract
| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the 2000 IMECE MEMS Symposium of the ASME International |
| Place of Publication | Orlando, USA |
| Pages | - |
| Number of pages | 6 |
| Publication status | Published - 5 Nov 2000 |
| Event | 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13 |
Conference
| Conference | 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 |
|---|---|
| Abbreviated title | MEMS |
| Country | Japan |
| City | Miyazaki |
| Period | 23/01/00 → 27/01/00 |
Keywords
- IR-16247
- METIS-113132
Cite this
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Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Tong, D.H.; Elwenspoek, Michael Curt.
Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, 2000. p. -.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review
TY - GEN
T1 - Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg
AU - Zwijze, A.F.
AU - Wiegerink, Remco J.
AU - Krijnen, Gijsbertus J.M.
AU - Tong, D.H.
AU - Elwenspoek, Michael Curt
PY - 2000/11/5
Y1 - 2000/11/5
N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
KW - IR-16247
KW - METIS-113132
M3 - Conference contribution
SP - -
BT - Proceedings of the 2000 IMECE MEMS Symposium of the ASME International
CY - Orlando, USA
ER -