Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, D.H. Tong, Michael Curt Elwenspoek

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    Abstract

    In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
    Original languageUndefined
    Title of host publicationProceedings of the 2000 IMECE MEMS Symposium of the ASME International
    Place of PublicationOrlando, USA
    Pages-
    Number of pages6
    Publication statusPublished - 5 Nov 2000
    Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
    Duration: 23 Jan 200027 Jan 2000
    Conference number: 13

    Conference

    Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
    Abbreviated titleMEMS
    CountryJapan
    CityMiyazaki
    Period23/01/0027/01/00

    Keywords

    • IR-16247
    • METIS-113132

    Cite this

    Zwijze, A. F., Wiegerink, R. J., Krijnen, G. J. M., Tong, D. H., & Elwenspoek, M. C. (2000). Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. In Proceedings of the 2000 IMECE MEMS Symposium of the ASME International (pp. -). Orlando, USA.