Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

A.F. Zwijze; Remco J. Wiegerink; Gijsbertus J.M. Krijnen; D.H. Tong; Michael Curt Elwenspoek

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, D.H. Tong, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

Original language	Undefined
Title of host publication	Proceedings of the 2000 IMECE MEMS Symposium of the ASME International
Place of Publication	Orlando, USA
Pages	-
Number of pages	6
Publication status	Published - 5 Nov 2000
Event	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13

Conference

Conference	13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
Abbreviated title	MEMS
Country/Territory	Japan
City	Miyazaki
Period	23/01/00 → 27/01/00

Keywords

IR-16247
METIS-113132

Access to Document

asme00[1]

Cite this

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title = "Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg",

abstract = "In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.",

keywords = "IR-16247, METIS-113132",

author = "A.F. Zwijze and Wiegerink, {Remco J.} and Krijnen, {Gijsbertus J.M.} and D.H. Tong and Elwenspoek, {Michael Curt}",

year = "2000",

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booktitle = "Proceedings of the 2000 IMECE MEMS Symposium of the ASME International",

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Zwijze, AF, Wiegerink, RJ , Krijnen, GJM, Tong, DH & Elwenspoek, MC 2000, Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. in Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, pp. -, 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000, Miyazaki, Japan, 23/01/00.

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. / Zwijze, A.F.; Wiegerink, Remco J.; Krijnen, Gijsbertus J.M.; Tong, D.H.; Elwenspoek, Michael Curt.

Proceedings of the 2000 IMECE MEMS Symposium of the ASME International. Orlando, USA, 2000. p. -.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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T1 - Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

AU - Zwijze, A.F.

AU - Wiegerink, Remco J.

AU - Krijnen, Gijsbertus J.M.

AU - Tong, D.H.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 13

PY - 2000/11/5

Y1 - 2000/11/5

N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

KW - IR-16247

KW - METIS-113132

M3 - Conference contribution

SP - -

BT - Proceedings of the 2000 IMECE MEMS Symposium of the ASME International

CY - Orlando, USA

Y2 - 23 January 2000 through 27 January 2000

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