Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, D.H. Tong, Michael Curt Elwenspoek

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    Abstract

    In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
    Original languageEnglish
    Title of host publicationProceedings of the 2000 IMECE MEMS Symposium of the ASME International
    Place of PublicationOrlando, USA
    Number of pages6
    Publication statusPublished - 5 Nov 2000
    Event13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan
    Duration: 23 Jan 200027 Jan 2000
    Conference number: 13

    Conference

    Conference13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000
    Abbreviated titleMEMS
    Country/TerritoryJapan
    CityMiyazaki
    Period23/01/0027/01/00

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