Abstract
In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of full-scale. Creep at 500 kg after 30 minutes is within 0.01 %. These measurements show that the performance has improved by a factor of 10 compared to the previous design.
Original language | English |
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Title of host publication | Proceedings of the 2000 IMECE MEMS Symposium of the ASME International |
Place of Publication | Orlando, USA |
Number of pages | 6 |
Publication status | Published - 5 Nov 2000 |
Event | 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 - Miyazaki, Japan Duration: 23 Jan 2000 → 27 Jan 2000 Conference number: 13 |
Conference
Conference | 13th Annual International Conference on Micro Electro Mechanical Systems, MEMS 2000 |
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Abbreviated title | MEMS |
Country/Territory | Japan |
City | Miyazaki |
Period | 23/01/00 → 27/01/00 |