Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

R.A.F. Zwijze; R.J. Wiegerink; G.J.M. Krijnen; T. Hien; M.C. Elwenspoek

doi:10.1115/IMECE2000-1066

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

R.A.F. Zwijze^*
, R.J. Wiegerink
, G.J.M. Krijnen
, T. Hien
, M.C. Elwenspoek

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of the full-scale output (fso). Creep at 500 kg after 30 minutes is within 0.01 % of the fso. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

Original language	English
Title of host publication	Micro-Electro-Mechanical Systems (MEMS)
Publisher	American Society of Mechanical Engineers
Pages	27-34
Number of pages	8
ISBN (Electronic)	9780791819005
DOIs	https://doi.org/10.1115/IMECE2000-1066
Publication status	Published - 2000
Event	ASME International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States Duration: 5 Nov 2000 → 10 Nov 2000

Conference

Conference	ASME International Mechanical Engineering Congress and Exposition, IMECE 2000
Abbreviated title	IMECE 2000
Country/Territory	United States
City	Orlando
Period	5/11/00 → 10/11/00

Keywords

2023 OA procedure

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10.1115/IMECE2000-1066

ArticleFinal published version, 167 KBLicence: Taverne

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title = "Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg",

abstract = "In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 \% of the full-scale output (fso). Creep at 500 kg after 30 minutes is within 0.01 \% of the fso. These measurements show that the performance has improved by a factor of 10 compared to the previous design.",

keywords = "2023 OA procedure",

author = "R.A.F. Zwijze and R.J. Wiegerink and G.J.M. Krijnen and T. Hien and M.C. Elwenspoek",

note = "Publisher Copyright: Copyright {\textcopyright} 2000 by ASME; ASME International Mechanical Engineering Congress and Exposition, IMECE 2000, IMECE 2000 ; Conference date: 05-11-2000 Through 10-11-2000",

year = "2000",

doi = "10.1115/IMECE2000-1066",

language = "English",

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publisher = "American Society of Mechanical Engineers",

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Zwijze, RAF, Wiegerink, RJ , Krijnen, GJM, Hien, T & Elwenspoek, MC 2000, Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg. in Micro-Electro-Mechanical Systems (MEMS). American Society of Mechanical Engineers, pp. 27-34, ASME International Mechanical Engineering Congress and Exposition, IMECE 2000, Orlando, Florida, United States, 5/11/00. https://doi.org/10.1115/IMECE2000-1066

TY - GEN

T1 - Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

AU - Zwijze, R.A.F.

AU - Wiegerink, R.J.

AU - Krijnen, G.J.M.

AU - Hien, T.

AU - Elwenspoek, M.C.

PY - 2000

Y1 - 2000

N2 - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of the full-scale output (fso). Creep at 500 kg after 30 minutes is within 0.01 % of the fso. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

AB - In this paper, a micromachined silicon load cell (force sensor) is presented for measuring loads up to 500 kg. The load cell has been realized and tested. Measurement results show a hysteresis error of ±0.02 % of the full-scale output (fso). Creep at 500 kg after 30 minutes is within 0.01 % of the fso. These measurements show that the performance has improved by a factor of 10 compared to the previous design.

KW - 2023 OA procedure

UR - https://www.scopus.com/pages/publications/85119975243

U2 - 10.1115/IMECE2000-1066

DO - 10.1115/IMECE2000-1066

M3 - Conference contribution

AN - SCOPUS:85119975243

SP - 27

EP - 34

BT - Micro-Electro-Mechanical Systems (MEMS)

PB - American Society of Mechanical Engineers

T2 - ASME International Mechanical Engineering Congress and Exposition, IMECE 2000

Y2 - 5 November 2000 through 10 November 2000

ER -

Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

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