Design and realization of a miniature capacitive silicon force sensor for loads up to 500 kg

A.F. Zwijze, Remco J. Wiegerink, Gijsbertus J.M. Krijnen, D.H. Tong, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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