Design challenges for stepper motor actuated microvalve based on fine and micro-machining

I. Fazal; Michael Curt Elwenspoek

Design challenges for stepper motor actuated microvalve based on fine and micro-machining

I. Fazal, Michael Curt Elwenspoek

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

Original language	Undefined
Title of host publication	18th Workshop on MicroMechanics Europe MME 2007
Place of Publication	Guimaraes, Portugal
Publisher	University of Minho
Pages	219-222
Number of pages	4
ISBN (Print)	978-972-98603-3-1
Publication status	Published - 16 Sep 2007
Event	18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal Duration: 16 Sep 2007 → 18 Sep 2007 Conference number: 18

Publication series

Name
Publisher	University of Minho
Number	WoTUG-31
Volume	19

Workshop

Workshop	18th MicroMechanics Europe Workshop, MME 2007
Abbreviated title	MME
Country	Portugal
City	Guimaraes
Period	16/09/07 → 18/09/07

Keywords

IR-65194
METIS-254967
EWI-14556

Access to Document

PMME_2007_imran
open
PMME_2007_imran
open

Cite this

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title = "Design challenges for stepper motor actuated microvalve based on fine and micro-machining",

abstract = "We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.",

keywords = "IR-65194, METIS-254967, EWI-14556",

author = "I. Fazal and Elwenspoek, {Michael Curt}",

year = "2007",

month = sep,

day = "16",

language = "Undefined",

isbn = "978-972-98603-3-1",

publisher = "University of Minho",

number = "WoTUG-31",

pages = "219--222",

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T1 - Design challenges for stepper motor actuated microvalve based on fine and micro-machining

AU - Fazal, I.

AU - Elwenspoek, Michael Curt

N1 - Conference code: 18

PY - 2007/9/16

Y1 - 2007/9/16

N2 - We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

AB - We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

KW - IR-65194

KW - METIS-254967

KW - EWI-14556

M3 - Conference contribution

SN - 978-972-98603-3-1

SP - 219

EP - 222

BT - 18th Workshop on MicroMechanics Europe MME 2007

PB - University of Minho

CY - Guimaraes, Portugal

Y2 - 16 September 2007 through 18 September 2007

ER -