Design challenges for stepper motor actuated microvalve based on fine and micro-machining

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Abstract

We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.
Original languageUndefined
Title of host publication18th Workshop on MicroMechanics Europe MME 2007
Place of PublicationGuimaraes, Portugal
PublisherUniversity of Minho
Pages219-222
Number of pages4
ISBN (Print)978-972-98603-3-1
Publication statusPublished - 16 Sep 2007
Event18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal
Duration: 16 Sep 200718 Sep 2007
Conference number: 18

Publication series

Name
PublisherUniversity of Minho
NumberWoTUG-31
Volume19

Workshop

Workshop18th MicroMechanics Europe Workshop, MME 2007
Abbreviated titleMME
CountryPortugal
CityGuimaraes
Period16/09/0718/09/07

Keywords

  • IR-65194
  • METIS-254967
  • EWI-14556

Cite this

Fazal, I., & Elwenspoek, M. C. (2007). Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In 18th Workshop on MicroMechanics Europe MME 2007 (pp. 219-222). Guimaraes, Portugal: University of Minho.
Fazal, I. ; Elwenspoek, Michael Curt. / Design challenges for stepper motor actuated microvalve based on fine and micro-machining. 18th Workshop on MicroMechanics Europe MME 2007. Guimaraes, Portugal : University of Minho, 2007. pp. 219-222
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title = "Design challenges for stepper motor actuated microvalve based on fine and micro-machining",
abstract = "We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.",
keywords = "IR-65194, METIS-254967, EWI-14556",
author = "I. Fazal and Elwenspoek, {Michael Curt}",
year = "2007",
month = "9",
day = "16",
language = "Undefined",
isbn = "978-972-98603-3-1",
publisher = "University of Minho",
number = "WoTUG-31",
pages = "219--222",
booktitle = "18th Workshop on MicroMechanics Europe MME 2007",

}

Fazal, I & Elwenspoek, MC 2007, Design challenges for stepper motor actuated microvalve based on fine and micro-machining. in 18th Workshop on MicroMechanics Europe MME 2007. University of Minho, Guimaraes, Portugal, pp. 219-222, 18th MicroMechanics Europe Workshop, MME 2007, Guimaraes, Portugal, 16/09/07.

Design challenges for stepper motor actuated microvalve based on fine and micro-machining. / Fazal, I.; Elwenspoek, Michael Curt.

18th Workshop on MicroMechanics Europe MME 2007. Guimaraes, Portugal : University of Minho, 2007. p. 219-222.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Design challenges for stepper motor actuated microvalve based on fine and micro-machining

AU - Fazal, I.

AU - Elwenspoek, Michael Curt

PY - 2007/9/16

Y1 - 2007/9/16

N2 - We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

AB - We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.

KW - IR-65194

KW - METIS-254967

KW - EWI-14556

M3 - Conference contribution

SN - 978-972-98603-3-1

SP - 219

EP - 222

BT - 18th Workshop on MicroMechanics Europe MME 2007

PB - University of Minho

CY - Guimaraes, Portugal

ER -

Fazal I, Elwenspoek MC. Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In 18th Workshop on MicroMechanics Europe MME 2007. Guimaraes, Portugal: University of Minho. 2007. p. 219-222