Design challenges for stepper motor actuated microvalve based on fine and micro-machining

I. Fazal, Michael Curt Elwenspoek

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    Abstract

    We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.
    Original languageUndefined
    Title of host publication18th Workshop on MicroMechanics Europe MME 2007
    Place of PublicationGuimaraes, Portugal
    PublisherUniversity of Minho
    Pages219-222
    Number of pages4
    ISBN (Print)978-972-98603-3-1
    Publication statusPublished - 16 Sep 2007
    Event18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal
    Duration: 16 Sep 200718 Sep 2007
    Conference number: 18

    Publication series

    Name
    PublisherUniversity of Minho
    NumberWoTUG-31
    Volume19

    Workshop

    Workshop18th MicroMechanics Europe Workshop, MME 2007
    Abbreviated titleMME
    CountryPortugal
    CityGuimaraes
    Period16/09/0718/09/07

    Keywords

    • IR-65194
    • METIS-254967
    • EWI-14556

    Cite this

    Fazal, I., & Elwenspoek, M. C. (2007). Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In 18th Workshop on MicroMechanics Europe MME 2007 (pp. 219-222). Guimaraes, Portugal: University of Minho.