Abstract
We present a normally open stepper motor actuated microvalve based on micro and fine-machining technique. In this paper, first we have described how the larger controllable flow range can be achieved with simple micromachining techniques and secondly we have presented the results which show how the performance of the microvalve can be improved by using combination of different metal screws for mechanical transmission of power to deflect the membrane to control the flow of gas.
| Original language | Undefined |
|---|---|
| Title of host publication | 18th Workshop on MicroMechanics Europe MME 2007 |
| Place of Publication | Guimaraes, Portugal |
| Publisher | University of Minho |
| Pages | 219-222 |
| Number of pages | 4 |
| ISBN (Print) | 978-972-98603-3-1 |
| Publication status | Published - 16 Sep 2007 |
| Event | 18th MicroMechanics Europe Workshop, MME 2007 - Guimaraes, Portugal Duration: 16 Sep 2007 → 18 Sep 2007 Conference number: 18 |
Publication series
| Name | |
|---|---|
| Publisher | University of Minho |
| Number | WoTUG-31 |
| Volume | 19 |
Workshop
| Workshop | 18th MicroMechanics Europe Workshop, MME 2007 |
|---|---|
| Abbreviated title | MME |
| Country | Portugal |
| City | Guimaraes |
| Period | 16/09/07 → 18/09/07 |
Keywords
- IR-65194
- METIS-254967
- EWI-14556
Cite this
Fazal, I., & Elwenspoek, M. C. (2007). Design challenges for stepper motor actuated microvalve based on fine and micro-machining. In 18th Workshop on MicroMechanics Europe MME 2007 (pp. 219-222). Guimaraes, Portugal: University of Minho.