Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges

H.A.C. Tilmans, S. Bouwstra, J.H.J. Fluitman, S.L. Spence

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)79-86
    Number of pages8
    JournalSensors and actuators. A: Physical
    Volume0
    Issue number25
    Publication statusPublished - 1991

    Keywords

    • METIS-112128

    Cite this

    Tilmans, H. A. C., Bouwstra, S., Fluitman, J. H. J., & Spence, S. L. (1991). Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges. Sensors and actuators. A: Physical, 0(25), 79-86.
    Tilmans, H.A.C. ; Bouwstra, S. ; Fluitman, J.H.J. ; Spence, S.L. / Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges. In: Sensors and actuators. A: Physical. 1991 ; Vol. 0, No. 25. pp. 79-86.
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    title = "Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges",
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    author = "H.A.C. Tilmans and S. Bouwstra and J.H.J. Fluitman and S.L. Spence",
    year = "1991",
    language = "Undefined",
    volume = "0",
    pages = "79--86",
    journal = "Sensors and actuators. A: Physical",
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    Tilmans, HAC, Bouwstra, S, Fluitman, JHJ & Spence, SL 1991, 'Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges' Sensors and actuators. A: Physical, vol. 0, no. 25, pp. 79-86.

    Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges. / Tilmans, H.A.C.; Bouwstra, S.; Fluitman, J.H.J.; Spence, S.L.

    In: Sensors and actuators. A: Physical, Vol. 0, No. 25, 1991, p. 79-86.

    Research output: Contribution to journalArticleAcademicpeer-review

    TY - JOUR

    T1 - Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges

    AU - Tilmans, H.A.C.

    AU - Bouwstra, S.

    AU - Fluitman, J.H.J.

    AU - Spence, S.L.

    PY - 1991

    Y1 - 1991

    KW - METIS-112128

    M3 - Article

    VL - 0

    SP - 79

    EP - 86

    JO - Sensors and actuators. A: Physical

    JF - Sensors and actuators. A: Physical

    SN - 0924-4247

    IS - 25

    ER -