Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges

H.A.C. Tilmans, S. Bouwstra, J.H.J. Fluitman, S.L. Spence

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)79-86
    Number of pages8
    JournalSensors and actuators. A: Physical
    Volume0
    Issue number25
    Publication statusPublished - 1991

    Keywords

    • METIS-112128

    Cite this

    Tilmans, H. A. C., Bouwstra, S., Fluitman, J. H. J., & Spence, S. L. (1991). Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges. Sensors and actuators. A: Physical, 0(25), 79-86.