Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	79-86
Number of pages	8
Journal	Sensors and Actuators A: Physical
Volume	0
Issue number	25
Publication status	Published - 1991

Keywords

@article{9559aad01d334062869c9871a146799a,

title = "Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges",

keywords = "METIS-112128",

author = "H.A.C. Tilmans and S. Bouwstra and J.H.J. Fluitman and S.L. Spence",

year = "1991",

language = "Undefined",

volume = "0",

pages = "79--86",

journal = "Sensors and Actuators A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

number = "25",

}

TY - JOUR

T1 - Design Conciderations for Micromechanical Sensors using Encapsulated Built-in Resonant Strain Gauges

AU - Tilmans, H.A.C.

AU - Bouwstra, S.

AU - Fluitman, J.H.J.

AU - Spence, S.L.

PY - 1991

Y1 - 1991

KW - METIS-112128

M3 - Article

SN - 0924-4247

VL - 0

SP - 79

EP - 86

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 25

ER -