Design considerations for a micromachined proportional control valve

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    Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.
    Original languageUndefined
    Pages (from-to)396-412
    Number of pages17
    Issue number2
    Publication statusPublished - 17 Apr 2012


    • low leakage
    • mass flow controller
    • micro actuator
    • EWI-22708
    • Microvalve
    • MEMS
    • METIS-286884
    • IR-83460
    • Flow control

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