Design considerations for a micromachined proportional control valve

Maarten Groen; Dannis Michel Brouwer; Remco J. Wiegerink; Joost Conrad Lötters

doi:10.3390/mi3020396

Design considerations for a micromachined proportional control valve

Maarten Groen, Dannis Michel Brouwer, Remco J. Wiegerink, Joost Conrad Lötters

Research output: Contribution to journal › Article › Academic › peer-review

11 Citations (Scopus)

177 Downloads (Pure)

Abstract

Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

Original language	English
Pages (from-to)	396-412
Number of pages	17
Journal	Micromachines
Volume	3
Issue number	2
DOIs	https://doi.org/10.3390/mi3020396
Publication status	Published - 17 Apr 2012

Keywords

Low leakage
Mass flow controller
Micro actuator
Microvalve
MEMS
Flow control
TST-FLUID HANDLING
UT-Gold-D

Access to Document

10.3390/mi3020396Licence: CC BY

ArticleFinal published version, 354 KBLicence: CC BY

Cite this

@article{dcba7ddc18a64ff98c3d2b3ce831b714,

title = "Design considerations for a micromachined proportional control valve",

abstract = "Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.",

keywords = "Low leakage, Mass flow controller, Micro actuator, Microvalve, MEMS, Flow control, TST-FLUID HANDLING, UT-Gold-D",

author = "Maarten Groen and Brouwer, {Dannis Michel} and Wiegerink, {Remco J.} and L{\"o}tters, {Joost Conrad}",

note = "Open access",

year = "2012",

month = apr,

day = "17",

doi = "10.3390/mi3020396",

language = "English",

volume = "3",

pages = "396--412",

journal = "Micromachines",

issn = "2072-666X",

publisher = "MDPI",

number = "2",

}

TY - JOUR

T1 - Design considerations for a micromachined proportional control valve

AU - Groen, Maarten

AU - Brouwer, Dannis Michel

AU - Wiegerink, Remco J.

AU - Lötters, Joost Conrad

N1 - Open access

PY - 2012/4/17

Y1 - 2012/4/17

N2 - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

AB - Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

KW - Low leakage

KW - Mass flow controller

KW - Micro actuator

KW - Microvalve

KW - MEMS

KW - Flow control

KW - TST-FLUID HANDLING

KW - UT-Gold-D

U2 - 10.3390/mi3020396

DO - 10.3390/mi3020396

M3 - Article

SN - 2072-666X

VL - 3

SP - 396

EP - 412

JO - Micromachines

JF - Micromachines

IS - 2

ER -

Design considerations for a micromachined proportional control valve

Abstract

Keywords

Access to Document

Fingerprint

Cite this