This paper describes the various design aspects for micromechanical sensors consisting of a structure with encapsulated built-in resonant strain gauges. Analytical models are used to investigate the effect of device parameters on the behaviour of a pressure sensor and a force sensor. The analyses indicate that the sealing cap can have a strong degrading effect on the device performance if the thicknesses of the cap and of the supporting structure are of the same order of magnitude. A novel design, employing bossed structures, is described, which reduces the design complexity and virtually eliminates the influence of the cap on the sensitivity of the sensor.
|Number of pages||8|
|Journal||Sensors and actuators. A: Physical|
|Publication status||Published - Oct 1990|
|Event||4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany|
Duration: 1 Oct 1990 → 3 Oct 1990
Conference number: 4