Design considerations for micromechanical sensors using encapsulated built-in resonant strain gauges

Harrie A.C. Tilmans, Siebe Bouwstra, J.H.J. Fluitman, Scott L. Spence

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    8 Citations (Scopus)
    23 Downloads (Pure)

    Abstract

    This paper describes the various design aspects for micromechanical sensors consisting of a structure with encapsulated built-in resonant strain gauges. Analytical models are used to investigate the effect of device parameters on the behaviour of a pressure sensor and a force sensor. The analyses indicate that the sealing cap can have a strong degrading effect on the device performance if the thicknesses of the cap and of the supporting structure are of the same order of magnitude. A novel design, employing bossed structures, is described, which reduces the design complexity and virtually eliminates the influence of the cap on the sensitivity of the sensor.
    Original languageEnglish
    Pages (from-to)79-86
    Number of pages8
    JournalSensors and actuators. A: Physical
    Volume25
    Issue number1-3
    DOIs
    Publication statusPublished - Oct 1990
    Event4th European Conference on Solid-State Transducers, Eurosensors 1990 - Karlsruhe, Germany
    Duration: 1 Oct 19903 Oct 1990
    Conference number: 4

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