Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair

H. Droogendijk; Meint J. de Boer; Remco G.P. Sanders; Gijsbertus J.M. Krijnen

doi:10.1109/ICSENS.2013.6688165

Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair

H. Droogendijk, Meint J. de Boer, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

3 Citations (Scopus)

Abstract

Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s^2 and is able to measure accelerations up to 1 g.

Original language	Undefined
Title of host publication	IEEE Sensors 2013
Place of Publication	USA
Publisher	IEEE Instrumentation & Measurement Society
Pages	167-170
Number of pages	4
ISBN (Print)	1930-0395
DOIs	https://doi.org/10.1109/ICSENS.2013.6688165
Publication status	Published - Nov 2013
Event	12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States Duration: 3 Nov 2013 → 6 Nov 2013 Conference number: 12 http://ieee-sensors2013.org/

Publication series

Name
Publisher	IEEE Instrumentation & Measurement Society
ISSN (Print)	1930-0395

Conference

Conference	12th IEEE Sensors 2013
Country	United States
City	Baltimore
Period	3/11/13 → 6/11/13
Internet address	http://ieee-sensors2013.org/

Keywords

TST-Life like
clavate hair
EWI-23915
IR-88345
METIS-300130
Biomimetic
Cricket
MEMS
Accelerometer

Access to Document

10.1109/ICSENS.2013.6688165

http://eprints.eemcs.utwente.nl/secure2/23915/01/extract_pdf_HarmenDroogendijk.pdf

Cite this

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title = "Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair",

abstract = "Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s^2 and is able to measure accelerations up to 1 g.",

keywords = "TST-Life like, clavate hair, EWI-23915, IR-88345, METIS-300130, Biomimetic, Cricket, MEMS, Accelerometer",

author = "H. Droogendijk and {de Boer}, {Meint J.} and Sanders, {Remco G.P.} and Krijnen, {Gijsbertus J.M.}",

year = "2013",

month = nov,

doi = "10.1109/ICSENS.2013.6688165",

language = "Undefined",

isbn = "1930-0395",

publisher = "IEEE Instrumentation & Measurement Society",

pages = "167--170",

booktitle = "IEEE Sensors 2013",

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Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair. / Droogendijk, H.; de Boer, Meint J.; Sanders, Remco G.P.; Krijnen, Gijsbertus J.M.

IEEE Sensors 2013. USA : IEEE Instrumentation & Measurement Society, 2013. p. 167-170.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

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AU - de Boer, Meint J.

AU - Sanders, Remco G.P.

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 12

PY - 2013/11

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AB - Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s^2 and is able to measure accelerations up to 1 g.

KW - TST-Life like

KW - clavate hair

KW - EWI-23915

KW - IR-88345

KW - METIS-300130

KW - Biomimetic

KW - Cricket

KW - MEMS

KW - Accelerometer

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