Abstract
Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s^2 and is able to measure accelerations up to 1 g.
Original language | Undefined |
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Title of host publication | IEEE Sensors 2013 |
Place of Publication | USA |
Publisher | IEEE |
Pages | 167-170 |
Number of pages | 4 |
ISBN (Print) | 1930-0395 |
DOIs | |
Publication status | Published - Nov 2013 |
Event | 12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States Duration: 3 Nov 2013 → 6 Nov 2013 Conference number: 12 http://ieee-sensors2013.org/ |
Publication series
Name | |
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Publisher | IEEE Instrumentation & Measurement Society |
ISSN (Print) | 1930-0395 |
Conference
Conference | 12th IEEE Sensors 2013 |
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Country/Territory | United States |
City | Baltimore |
Period | 3/11/13 → 6/11/13 |
Internet address |
Keywords
- TST-Life like
- clavate hair
- EWI-23915
- IR-88345
- METIS-300130
- Biomimetic
- Cricket
- MEMS
- Accelerometer