Design, fabrication and characterisation of a biomimetic accelerometer inspired by the cricket's clavate hair

H. Droogendijk, Meint J. de Boer, Remco G.P. Sanders, Gijsbertus J.M. Krijnen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    Crickets use so-called clavate hairs to sense (gravitational) acceleration to obtain information on their orientation. Inspired by this clavate hair system, a biomimetic accelerometer has been developed and fabricated using surface micromachining and SU-8 lithography. First measurements indicate that this MEMS hair-based accelerometer has a resonance frequency of 367 Hz, a detection threshold of 0.63 m/s^2 and is able to measure accelerations up to 1 g.
    Original languageUndefined
    Title of host publicationIEEE Sensors 2013
    Place of PublicationUSA
    PublisherIEEE
    Pages167-170
    Number of pages4
    ISBN (Print)1930-0395
    DOIs
    Publication statusPublished - Nov 2013
    Event12th IEEE Sensors 2013 - Renaissance Baltimore Harborplace Hotel, Baltimore, United States
    Duration: 3 Nov 20136 Nov 2013
    Conference number: 12
    http://ieee-sensors2013.org/

    Publication series

    Name
    PublisherIEEE Instrumentation & Measurement Society
    ISSN (Print)1930-0395

    Conference

    Conference12th IEEE Sensors 2013
    Country/TerritoryUnited States
    CityBaltimore
    Period3/11/136/11/13
    Internet address

    Keywords

    • TST-Life like
    • clavate hair
    • EWI-23915
    • IR-88345
    • METIS-300130
    • Biomimetic
    • Cricket
    • MEMS
    • Accelerometer

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