Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer

Research output: Contribution to journalArticleAcademic

25 Citations (Scopus)

Abstract

A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, fabricated and characterized. The outer dimensions of the sensors are 5 mm × 5 mm × 5 mm. The devices are mounted on a standard IC package for easy testing. Features of the triaxial accelerometer are a highly symmetrical cubic structure, capacitive coupling of the high-frequency input voltage to the seismic mass, and the use of the polymer polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as the flexible interconnection layer between the capacitor plates. The sensor structure and its basic operating principle, its mathematical mass-spring-damper model and the cleanroom technology necessary for the fabrication of the devices are described. The measurement results show a sensitivity of ~ 0.2V (m s−2)−1 with a corresponding resolution of 0.01 m s−2, an off-axis sensitivity of < 5%, a good linearity in the output voltage for accelerations up to at least 50 m s−2 and a bandwidth of d.c. to ~ 1 kHz.
Original languageEnglish
Pages (from-to)205-212
JournalSensors and actuators. A: Physical
Volume66
Issue number1-3
DOIs
Publication statusPublished - 1998

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accelerometers
Accelerometers
Capacitors
Fabrication
fabrication
capacitors
Sensors
Electric potential
Polydimethylsiloxane
Polyimides
Polymers
sensitivity
sensors
dampers
electric potential
Bandwidth
polyimides
linearity
Testing
bandwidth

Keywords

  • Triaxial accelerometers
  • Biomedical applications
  • Three-dimensional structures
  • Capacitive sensors

Cite this

@article{0ab431d2753849fc9ea3b1603a69a73c,
title = "Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer",
abstract = "A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, fabricated and characterized. The outer dimensions of the sensors are 5 mm × 5 mm × 5 mm. The devices are mounted on a standard IC package for easy testing. Features of the triaxial accelerometer are a highly symmetrical cubic structure, capacitive coupling of the high-frequency input voltage to the seismic mass, and the use of the polymer polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as the flexible interconnection layer between the capacitor plates. The sensor structure and its basic operating principle, its mathematical mass-spring-damper model and the cleanroom technology necessary for the fabrication of the devices are described. The measurement results show a sensitivity of ~ 0.2V (m s−2)−1 with a corresponding resolution of 0.01 m s−2, an off-axis sensitivity of < 5{\%}, a good linearity in the output voltage for accelerations up to at least 50 m s−2 and a bandwidth of d.c. to ~ 1 kHz.",
keywords = "Triaxial accelerometers, Biomedical applications, Three-dimensional structures, Capacitive sensors",
author = "J.C. Lotters and Bomer, {Johan G.} and A.J. Verloop and E.A. Droog and W. Olthuis and P.H. Veltink and P. Bergveld",
year = "1998",
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pages = "205--212",
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Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer. / Lotters, J.C.; Bomer, Johan G.; Verloop, A.J.; Droog, E.A.; Olthuis, W.; Veltink, P.H.; Bergveld, P.

In: Sensors and actuators. A: Physical, Vol. 66, No. 1-3, 1998, p. 205-212.

Research output: Contribution to journalArticleAcademic

TY - JOUR

T1 - Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer

AU - Lotters, J.C.

AU - Bomer, Johan G.

AU - Verloop, A.J.

AU - Droog, E.A.

AU - Olthuis, W.

AU - Veltink, P.H.

AU - Bergveld, P.

PY - 1998

Y1 - 1998

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AB - A highly symmetrical cubic capacitive triaxial accelerometer for biomedical applications has been designed, fabricated and characterized. The outer dimensions of the sensors are 5 mm × 5 mm × 5 mm. The devices are mounted on a standard IC package for easy testing. Features of the triaxial accelerometer are a highly symmetrical cubic structure, capacitive coupling of the high-frequency input voltage to the seismic mass, and the use of the polymer polydimethylsiloxane (PDMS) as spring material between the capacitor plates and the mass and polyimide (PI) as the flexible interconnection layer between the capacitor plates. The sensor structure and its basic operating principle, its mathematical mass-spring-damper model and the cleanroom technology necessary for the fabrication of the devices are described. The measurement results show a sensitivity of ~ 0.2V (m s−2)−1 with a corresponding resolution of 0.01 m s−2, an off-axis sensitivity of < 5%, a good linearity in the output voltage for accelerations up to at least 50 m s−2 and a bandwidth of d.c. to ~ 1 kHz.

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