Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators

Yaxiang Zeng*, Jarno Groenesteijn, Dennis Alveringh, Remco J. Wiegerink, Joost C. Lötters

*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

8 Citations (Scopus)
244 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Design, Fabrication, and Characterization of a Micro Coriolis Mass Flow Sensor Driven by PZT Thin Film Actuators'. Together they form a unique fingerprint.

Engineering

Physics