Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machining

In this paper, we present the design, fabrication and characterization of a novel gas microvalve realized by combining micro- and fine-machining techniques. The design is for high flow rates at high pressure difference between inlet and outlet, burst pressure of up to 15 bars. There is no power consumption required for the valve to maintain its position during operation in any intermediate state and the process gas does not interact with the actuation mechanism. The microvalve was experimentally characterized with air flows. It is shown that flow rates of 220 ml min$^{−1}$ at a pressure difference of 4 bars could be achieved with a minimum accurate flow rate of 4 ml min$^{−1}$.