Design, fabrication and characterization of a suspended plate mechano-optical modulator

M.B. Syed Nawazuddin; Meint J. de Boer; Johan W. Berenschot; Kechun Ma; Michael Curt Elwenspoek; Remco J. Wiegerink

Design, fabrication and characterization of a suspended plate mechano-optical modulator

M.B. Syed Nawazuddin, Meint J. de Boer, Johan W. Berenschot, Kechun Ma, Michael Curt Elwenspoek, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.

Original language	Undefined
Title of host publication	26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
Publisher	IEEE
Pages	560-563
Number of pages	4
ISBN (Print)	978-1-4673-5655-8
Publication status	Published - 20 Jan 2013
Event	26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan Duration: 20 Jan 2013 → 24 Jan 2013 Conference number: 26

Publication series

Name
Publisher	IEEE

Conference

Conference	26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
Abbreviated title	MEMS
Country/Territory	Taiwan
City	Taipei
Period	20/01/13 → 24/01/13

Keywords

EWI-23047
METIS-296289
IR-84155

Access to Document

http://eprints.eemcs.utwente.nl/secure2/23047/01/076-Th.pdf

Cite this

@inproceedings{679c0db2137c48e5a6e969b9460adaf7,

title = "Design, fabrication and characterization of a suspended plate mechano-optical modulator",

abstract = "A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.",

keywords = "EWI-23047, METIS-296289, IR-84155",

author = "{Syed Nawazuddin}, M.B. and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Kechun Ma and Elwenspoek, {Michael Curt} and Wiegerink, {Remco J.}",

note = "http://www.mems2013.org/; 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

year = "2013",

month = jan,

day = "20",

language = "Undefined",

isbn = "978-1-4673-5655-8",

publisher = "IEEE",

pages = "560--563",

booktitle = "26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013",

address = "United States",

}

Syed Nawazuddin, MB, de Boer, MJ, Berenschot, JW , Ma, K, Elwenspoek, MC & Wiegerink, RJ 2013, Design, fabrication and characterization of a suspended plate mechano-optical modulator. in 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, pp. 560-563, 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, 20/01/13. <http://eprints.eemcs.utwente.nl/secure2/23047/01/076-Th.pdf>

Design, fabrication and characterization of a suspended plate mechano-optical modulator. / Syed Nawazuddin, M.B.; de Boer, Meint J.; Berenschot, Johan W. et al.
26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, 2013. p. 560-563.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design, fabrication and characterization of a suspended plate mechano-optical modulator

AU - Syed Nawazuddin, M.B.

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Ma, Kechun

AU - Elwenspoek, Michael Curt

AU - Wiegerink, Remco J.

N1 - Conference code: 26

PY - 2013/1/20

Y1 - 2013/1/20

N2 - A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.

AB - A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.

KW - EWI-23047

KW - METIS-296289

KW - IR-84155

M3 - Conference contribution

SN - 978-1-4673-5655-8

SP - 560

EP - 563

BT - 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013

PB - IEEE

T2 - 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -