Design, fabrication and characterization of a suspended plate mechano-optical modulator

M.B. Syed Nawazuddin, Meint J. de Boer, Johan W. Berenschot, Kechun Ma, Michael Curt Elwenspoek, Remco J. Wiegerink

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.
Original languageUndefined
Title of host publication26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
PublisherIEEE
Pages560-563
Number of pages4
ISBN (Print)978-1-4673-5655-8
Publication statusPublished - 20 Jan 2013
Event26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: 20 Jan 201324 Jan 2013
Conference number: 26

Publication series

Name
PublisherIEEE

Conference

Conference26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
Abbreviated titleMEMS
CountryTaiwan, Province of China
CityTaipei
Period20/01/1324/01/13

Keywords

  • EWI-23047
  • METIS-296289
  • IR-84155

Cite this

Syed Nawazuddin, M. B., de Boer, M. J., Berenschot, J. W., Ma, K., Elwenspoek, M. C., & Wiegerink, R. J. (2013). Design, fabrication and characterization of a suspended plate mechano-optical modulator. In 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 560-563). IEEE.
Syed Nawazuddin, M.B. ; de Boer, Meint J. ; Berenschot, Johan W. ; Ma, Kechun ; Elwenspoek, Michael Curt ; Wiegerink, Remco J. / Design, fabrication and characterization of a suspended plate mechano-optical modulator. 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, 2013. pp. 560-563
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title = "Design, fabrication and characterization of a suspended plate mechano-optical modulator",
abstract = "A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.",
keywords = "EWI-23047, METIS-296289, IR-84155",
author = "{Syed Nawazuddin}, M.B. and {de Boer}, {Meint J.} and Berenschot, {Johan W.} and Kechun Ma and Elwenspoek, {Michael Curt} and Wiegerink, {Remco J.}",
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Syed Nawazuddin, MB, de Boer, MJ, Berenschot, JW, Ma, K, Elwenspoek, MC & Wiegerink, RJ 2013, Design, fabrication and characterization of a suspended plate mechano-optical modulator. in 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, pp. 560-563, 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 20/01/13.

Design, fabrication and characterization of a suspended plate mechano-optical modulator. / Syed Nawazuddin, M.B.; de Boer, Meint J.; Berenschot, Johan W.; Ma, Kechun; Elwenspoek, Michael Curt; Wiegerink, Remco J.

26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE, 2013. p. 560-563.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Design, fabrication and characterization of a suspended plate mechano-optical modulator

AU - Syed Nawazuddin, M.B.

AU - de Boer, Meint J.

AU - Berenschot, Johan W.

AU - Ma, Kechun

AU - Elwenspoek, Michael Curt

AU - Wiegerink, Remco J.

N1 - http://www.mems2013.org/

PY - 2013/1/20

Y1 - 2013/1/20

N2 - A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.

AB - A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.

KW - EWI-23047

KW - METIS-296289

KW - IR-84155

M3 - Conference contribution

SN - 978-1-4673-5655-8

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EP - 563

BT - 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013

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Syed Nawazuddin MB, de Boer MJ, Berenschot JW, Ma K, Elwenspoek MC, Wiegerink RJ. Design, fabrication and characterization of a suspended plate mechano-optical modulator. In 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013. IEEE. 2013. p. 560-563