Design, fabrication and characterization of a suspended plate mechano-optical modulator

M.B. Syed Nawazuddin, Meint J. de Boer, Johan W. Berenschot, Kechun Ma, Michael Curt Elwenspoek, Remco J. Wiegerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.
    Original languageUndefined
    Title of host publication26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
    PublisherIEEE
    Pages560-563
    Number of pages4
    ISBN (Print)978-1-4673-5655-8
    Publication statusPublished - 20 Jan 2013
    Event26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
    Duration: 20 Jan 201324 Jan 2013
    Conference number: 26

    Publication series

    Name
    PublisherIEEE

    Conference

    Conference26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013
    Abbreviated titleMEMS
    CountryTaiwan, Province of China
    CityTaipei
    Period20/01/1324/01/13

    Keywords

    • EWI-23047
    • METIS-296289
    • IR-84155

    Cite this

    Syed Nawazuddin, M. B., de Boer, M. J., Berenschot, J. W., Ma, K., Elwenspoek, M. C., & Wiegerink, R. J. (2013). Design, fabrication and characterization of a suspended plate mechano-optical modulator. In 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 560-563). IEEE.