Abstract
A mechano-optical modulator is presented based on the Integrated Optical Nano-Mechanical (IONM) effect. It consists of a light-weight, rigid silicon-nitride suspended plate structure with strengthening ridges and bi-directional electrostatic actuation to maximize switching speed. The mechanical structure and optical waveguide are realized on separate chips and then assembled together resulting in hybrid integration. The latter is made possible by using a self-alignment technique which results in a misalignment error of at most 2 μm.
| Original language | Undefined |
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| Title of host publication | 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 |
| Publisher | IEEE |
| Pages | 560-563 |
| Number of pages | 4 |
| ISBN (Print) | 978-1-4673-5655-8 |
| Publication status | Published - 20 Jan 2013 |
| Event | 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 20 Jan 2013 → 24 Jan 2013 Conference number: 26 |
Publication series
| Name | |
|---|---|
| Publisher | IEEE |
Conference
| Conference | 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 |
|---|---|
| Abbreviated title | MEMS |
| Country | Taiwan, Province of China |
| City | Taipei |
| Period | 20/01/13 → 24/01/13 |
Keywords
- EWI-23047
- METIS-296289
- IR-84155
Cite this
Syed Nawazuddin, M. B., de Boer, M. J., Berenschot, J. W., Ma, K., Elwenspoek, M. C., & Wiegerink, R. J. (2013). Design, fabrication and characterization of a suspended plate mechano-optical modulator. In 26th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 560-563). IEEE.