Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

Edin Sarajlic, J. Geerlings, Johan W. Berenschot, Martin Herman Siekman, Niels Roelof Tas, Leon Abelmann

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademic

    74 Downloads (Pure)


    Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating feasibility and the large innovation potential of this method.
    Original languageUndefined
    Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
    Place of PublicationEnschede
    PublisherUniversity of Twente
    Number of pages4
    ISBN (Print)978-90-81673716
    Publication statusPublished - Sept 2010
    Event21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands
    Duration: 26 Sept 201029 Sept 2010
    Conference number: 21

    Publication series

    PublisherUniversity of Twente, Transducers Science and Technology (TST)


    Workshop21st Micromechanics and Microsystems Europe Workshop, MME 2010
    Abbreviated titleMME


    • METIS-276156
    • Atomic Force Microscopy
    • IR-74823
    • Video-rate AFM
    • TST-SMI: Formerly in EWI-SMI
    • Probes
    • EWI-18872
    • TST-uSPAM: micro Scanning Probe Array Memory
    • KOH etching

    Cite this