Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

Edin Sarajlic; J. Geerlings; Johan W. Berenschot; Martin Herman Siekman; Niels Roelof Tas; Leon Abelmann

Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

Edin Sarajlic, J. Geerlings, Johan W. Berenschot, Martin Herman Siekman, Niels Roelof Tas, Leon Abelmann

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

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Abstract

Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating feasibility and the large innovation potential of this method.

Original language	Undefined
Title of host publication	Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)
Place of Publication	Enschede
Publisher	University of Twente
Pages	24-27
Number of pages	4
ISBN (Print)	978-90-81673716
Publication status	Published - Sept 2010
Event	21st Micromechanics and Microsystems Europe Workshop, MME 2010 - University of Twente, Enschede, Netherlands Duration: 26 Sept 2010 → 29 Sept 2010 Conference number: 21

Publication series

Name
Publisher	University of Twente, Transducers Science and Technology (TST)

Workshop

Workshop	21st Micromechanics and Microsystems Europe Workshop, MME 2010
Abbreviated title	MME
Country/Territory	Netherlands
City	Enschede
Period	26/09/10 → 29/09/10

Keywords

METIS-276156
Atomic Force Microscopy
IR-74823
Video-rate AFM
TST-SMI: Formerly in EWI-SMI
Probes
EWI-18872
TST-uSPAM: micro Scanning Probe Array Memory
KOH etching

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Cite this

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title = "Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip",

abstract = "Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating feasibility and the large innovation potential of this method.",

keywords = "METIS-276156, Atomic Force Microscopy, IR-74823, Video-rate AFM, TST-SMI: Formerly in EWI-SMI, Probes, EWI-18872, TST-uSPAM: micro Scanning Probe Array Memory, KOH etching",

author = "Edin Sarajlic and J. Geerlings and Berenschot, {Johan W.} and Siekman, {Martin Herman} and Tas, {Niels Roelof} and Leon Abelmann",

year = "2010",

month = sep,

language = "Undefined",

isbn = "978-90-81673716",

publisher = "University of Twente",

pages = "24--27",

booktitle = "Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)",

address = "Netherlands",

note = "21st Micromechanics and Microsystems Europe Workshop, MME 2010 ; Conference date: 26-09-2010 Through 29-09-2010",

}

Sarajlic, E, Geerlings, J, Berenschot, JW , Siekman, MH , Tas, NR & Abelmann, L 2010, Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. in Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). University of Twente, Enschede, pp. 24-27, 21st Micromechanics and Microsystems Europe Workshop, MME 2010, Enschede, Netherlands, 26/09/10.

Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip. / Sarajlic, Edin; Geerlings, J.; Berenschot, Johan W. et al.
Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010). Enschede: University of Twente, 2010. p. 24-27.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic

TY - GEN

T1 - Design fabrication and characterization of an in-plane AFM probe with ultra-sharp silicon nitride tip

AU - Sarajlic, Edin

AU - Geerlings, J.

AU - Berenschot, Johan W.

AU - Siekman, Martin Herman

AU - Tas, Niels Roelof

AU - Abelmann, Leon

N1 - Conference code: 21

PY - 2010/9

Y1 - 2010/9

N2 - Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating feasibility and the large innovation potential of this method.

AB - Scanning rates of the atomic force microscope (AFM) could be significantly increased by integrating the force sensing probe with microelectromechanical systems (MEMS). We present a micromachining method for batch fabrication of in-plane AFM probes that consist of an ultra-sharp silicon nitride tip on a single crystal silicon cantilever. Our fabrication method is fully compatible with the silicon-on-insulator (SOI) micromachining allowing a straightforward monolithic integration of the AFM probes with high-aspect-ratio monocrystalline silicon MEMS. Scanning probes with a sharp tip having diameter of less then 10 nm are successfully realized and tested in a commercial AFM set-up demonstrating feasibility and the large innovation potential of this method.

KW - METIS-276156

KW - Atomic Force Microscopy

KW - IR-74823

KW - Video-rate AFM

KW - TST-SMI: Formerly in EWI-SMI

KW - Probes

KW - EWI-18872

KW - TST-uSPAM: micro Scanning Probe Array Memory

KW - KOH etching

M3 - Conference contribution

SN - 978-90-81673716

SP - 24

EP - 27

BT - Proceedings of the 21st Micromechanics and Micro systems Europe workshop (MME 2010)

PB - University of Twente

CY - Enschede

T2 - 21st Micromechanics and Microsystems Europe Workshop, MME 2010

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