Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

Niels Roelof Tas, T. Sonneberg, R. Molenaar, Michael Curt Elwenspoek

    Research output: Contribution to journalArticleAcademicpeer-review

    Original languageUndefined
    Pages (from-to)N6-N15
    JournalJournal of micromechanics and microengineering
    Issue number13
    Publication statusPublished - 2002

    Keywords

    • METIS-207641

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