Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

Niels Roelof Tas, T. Sonneberg, R. Molenaar, Michael Curt Elwenspoek

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined
Pages (from-to)	N6-N15
Journal	Journal of micromechanics and microengineering
Issue number	13
Publication status	Published - 2002

Keywords

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title = "Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage",

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author = "Tas, {Niels Roelof} and T. Sonneberg and R. Molenaar and Elwenspoek, {Michael Curt}",

year = "2002",

language = "Undefined",

pages = "N6--N15",

journal = "Journal of micromechanics and microengineering",

issn = "0960-1317",

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TY - JOUR

T1 - Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

AU - Tas, Niels Roelof

AU - Sonneberg, T.

AU - Molenaar, R.

AU - Elwenspoek, Michael Curt

PY - 2002

Y1 - 2002

KW - METIS-207641

M3 - Article

SP - N6-N15

JO - Journal of micromechanics and microengineering

JF - Journal of micromechanics and microengineering

SN - 0960-1317

IS - 13

ER -