Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

Niels Roelof Tas, R. Molenaar, A.H. Sonnenberg, M.P. Koster, Michael Curt Elwenspoek

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition
    Pages-
    Publication statusPublished - 7 Jun 2000
    EventASME International Mechanical Engineering Congress & Exposition, IMECE 2000 - Orlando, United States
    Duration: 5 Nov 200010 Nov 2000

    Conference

    ConferenceASME International Mechanical Engineering Congress & Exposition, IMECE 2000
    Abbreviated titleIMECE
    CountryUnited States
    CityOrlando
    Period5/11/0010/11/00

    Keywords

    • IR-16248
    • METIS-113133

    Cite this

    Tas, N. R., Molenaar, R., Sonnenberg, A. H., Koster, M. P., & Elwenspoek, M. C. (2000). Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. In Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition (pp. -)