Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

N. R. Tas*, R. Molenaar, T. Sonnenberg, J. P. Baartman, M. P. Koster, M. Elwenspoek

*Corresponding author for this work

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.

    Original languageEnglish
    Title of host publicationProceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition
    PublisherThe American Society of Mechanical Engineers(ASME)
    Pages169-176
    Number of pages8
    ISBN (Electronic)9780791819005
    DOIs
    Publication statusPublished - 7 Jun 2000
    EventASME International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States
    Duration: 5 Nov 200010 Nov 2000

    Conference

    ConferenceASME International Mechanical Engineering Congress and Exposition, IMECE 2000
    Abbreviated titleIMECE 2000
    Country/TerritoryUnited States
    CityOrlando
    Period5/11/0010/11/00

    Keywords

    • IR-16248
    • METIS-113133

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