Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

N. R. Tas; R. Molenaar; T. Sonnenberg; J. P. Baartman; M. P. Koster; M. Elwenspoek

doi:10.1115/IMECE2000-1088

Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

N. R. Tas^*, R. Molenaar, T. Sonnenberg, J. P. Baartman, M. P. Koster, M. Elwenspoek

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Abstract

This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.

Original language	English
Title of host publication	Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition
Publisher	American Society of Mechanical Engineers
Pages	169-176
Number of pages	8
ISBN (Electronic)	9780791819005
DOIs	https://doi.org/10.1115/IMECE2000-1088
Publication status	Published - 7 Jun 2000
Event	ASME International Mechanical Engineering Congress and Exposition, IMECE 2000 - Orlando, United States Duration: 5 Nov 2000 → 10 Nov 2000

Conference

Conference	ASME International Mechanical Engineering Congress and Exposition, IMECE 2000
Abbreviated title	IMECE 2000
Country/Territory	United States
City	Orlando
Period	5/11/00 → 10/11/00

Keywords

IR-16248
METIS-113133

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1115/IMECE2000-1088

Cite this

Tas, N. R., Molenaar, R., Sonnenberg, T., Baartman, J. P., Koster, M. P., & Elwenspoek, M. (2000). Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. In Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition (pp. 169-176). American Society of Mechanical Engineers. https://doi.org/10.1115/IMECE2000-1088

@inproceedings{0838003000cb428fa36bd5786ddf6a8b,

title = "Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage",

abstract = "This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.",

keywords = "IR-16248, METIS-113133",

author = "Tas, {N. R.} and R. Molenaar and T. Sonnenberg and Baartman, {J. P.} and Koster, {M. P.} and M. Elwenspoek",

note = "Funding Information: The authors would like to thank Huib van Vossen and Arie Kooij for making the masks, and Bert Otter for the SEM photographs. We are grateful to Erwin Berenschot and Meint de Boer for the advices and assistance concerning the cleanroom fabrication. Publisher Copyright: Copyright {\textcopyright} 2000 by ASME; ASME International Mechanical Engineering Congress and Exposition, IMECE 2000, IMECE 2000 ; Conference date: 05-11-2000 Through 10-11-2000",

year = "2000",

month = jun,

day = "7",

doi = "10.1115/IMECE2000-1088",

language = "English",

pages = "169--176",

booktitle = "Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition",

publisher = "American Society of Mechanical Engineers",

address = "United States",

}

Tas, NR , Molenaar, R, Sonnenberg, T, Baartman, JP, Koster, MP & Elwenspoek, M 2000, Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. in Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition. American Society of Mechanical Engineers, pp. 169-176, ASME International Mechanical Engineering Congress and Exposition, IMECE 2000, Orlando, Florida, United States, 5/11/00. https://doi.org/10.1115/IMECE2000-1088

Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. / Tas, N. R.; Molenaar, R.; Sonnenberg, T. et al.
Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition. American Society of Mechanical Engineers, 2000. p. 169-176.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

AU - Tas, N. R.

AU - Molenaar, R.

AU - Sonnenberg, T.

AU - Baartman, J. P.

AU - Koster, M. P.

AU - Elwenspoek, M.

N1 - Funding Information: The authors would like to thank Huib van Vossen and Arie Kooij for making the masks, and Bert Otter for the SEM photographs. We are grateful to Erwin Berenschot and Meint de Boer for the advices and assistance concerning the cleanroom fabrication. Publisher Copyright: Copyright © 2000 by ASME

PY - 2000/6/7

Y1 - 2000/6/7

N2 - This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.

AB - This paper describes the design, fabrication and testing of laterally driven linear electrostatic micromotors. The motors employ mechanical leverage with the aim to increase the force from the order of 1 μN up to the order of 0.1 mN, in combination with walking motion to increase the stroke to virtually unlimited. Three designs have been made and tested. Although walking motion has been shown to be feasible in MEMS technology, improvement of the clamping is needed to benefit from the use of levers to increase the generated force.

KW - IR-16248

KW - METIS-113133

UR - http://www.scopus.com/inward/record.url?scp=85119981529&partnerID=8YFLogxK

U2 - 10.1115/IMECE2000-1088

DO - 10.1115/IMECE2000-1088

M3 - Conference contribution

SP - 169

EP - 176

BT - Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition

PB - American Society of Mechanical Engineers

T2 - ASME International Mechanical Engineering Congress and Exposition, IMECE 2000

Y2 - 5 November 2000 through 10 November 2000

ER -

Tas NR , Molenaar R, Sonnenberg T, Baartman JP, Koster MP, Elwenspoek M. Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage. In Proceedings of the MEMS Symposium at the 2000 International Mechanical Engineering Congress & Exposition. American Society of Mechanical Engineers. 2000. p. 169-176 doi: 10.1115/IMECE2000-1088

Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage

Abstract

Conference

Keywords

UN SDGs

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