Design of a high frequency MEMS scanning mirror

Herman Soemers, K. Krastev, D. van Lierop

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the 23th ASPE Annual Meeting
Place of Publication	Portland, Oregon, USA
Publisher	American Society for Precision Engineering
Pages	-
ISBN (Print)	978-1-887706-47-6
Publication status	Published - 19 Oct 2008
Event	23th ASPE Annual Meeting 2008 - Portland, United States Duration: 19 Oct 2008 → 24 Oct 2008 Conference number: 23

Keywords

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title = "Design of a high frequency MEMS scanning mirror",

keywords = "METIS-249725",

author = "Herman Soemers and K. Krastev and {van Lierop}, D.",

year = "2008",

month = oct,

day = "19",

language = "Undefined",

isbn = "978-1-887706-47-6",

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booktitle = "Proceedings of the 23th ASPE Annual Meeting",

publisher = "American Society for Precision Engineering",

address = "United States",

note = "23th ASPE Annual Meeting 2008 ; Conference date: 19-10-2008 Through 24-10-2008",

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TY - GEN

T1 - Design of a high frequency MEMS scanning mirror

AU - Soemers, Herman

AU - Krastev, K.

AU - van Lierop, D.

N1 - Conference code: 23

PY - 2008/10/19

Y1 - 2008/10/19

KW - METIS-249725

M3 - Conference contribution

SN - 978-1-887706-47-6

SP - -

BT - Proceedings of the 23th ASPE Annual Meeting

PB - American Society for Precision Engineering

CY - Portland, Oregon, USA

T2 - 23th ASPE Annual Meeting 2008

Y2 - 19 October 2008 through 24 October 2008

ER -