Design of a high frequency MEMS scanning mirror

Herman Soemers, K. Krastev, D. van Lierop

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    Original languageUndefined
    Title of host publicationProceedings of the 23th ASPE Annual Meeting
    Place of PublicationPortland, Oregon, USA
    PublisherAmerican Society for Precision Engineering
    Pages-
    ISBN (Print)978-1-887706-47-6
    Publication statusPublished - 19 Oct 2008
    Event23th ASPE Annual Meeting 2008 - Portland, United States
    Duration: 19 Oct 200824 Oct 2008
    Conference number: 23

    Conference

    Conference23th ASPE Annual Meeting 2008
    CountryUnited States
    CityPortland
    Period19/10/0824/10/08

    Keywords

    • METIS-249725

    Cite this

    Soemers, H., Krastev, K., & van Lierop, D. (2008). Design of a high frequency MEMS scanning mirror. In Proceedings of the 23th ASPE Annual Meeting (pp. -). Portland, Oregon, USA: American Society for Precision Engineering.