Design of a high frequency MEMS scanning mirror

Herman Soemers, K. Krastev, D. van Lierop

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    1 Citation (Scopus)
    Original languageUndefined
    Title of host publicationProceedings of the 23th ASPE Annual Meeting
    Place of PublicationPortland, Oregon, USA
    PublisherAmerican Society for Precision Engineering
    Pages-
    ISBN (Print)978-1-887706-47-6
    Publication statusPublished - 19 Oct 2008
    Event23th ASPE Annual Meeting 2008 - Portland, United States
    Duration: 19 Oct 200824 Oct 2008
    Conference number: 23

    Conference

    Conference23th ASPE Annual Meeting 2008
    CountryUnited States
    CityPortland
    Period19/10/0824/10/08

    Keywords

    • METIS-249725

    Cite this

    Soemers, H., Krastev, K., & van Lierop, D. (2008). Design of a high frequency MEMS scanning mirror. In Proceedings of the 23th ASPE Annual Meeting (pp. -). Portland, Oregon, USA: American Society for Precision Engineering.
    Soemers, Herman ; Krastev, K. ; van Lierop, D. / Design of a high frequency MEMS scanning mirror. Proceedings of the 23th ASPE Annual Meeting. Portland, Oregon, USA : American Society for Precision Engineering, 2008. pp. -
    @inproceedings{7a22cec0679b409fbb45c652d7a4b909,
    title = "Design of a high frequency MEMS scanning mirror",
    keywords = "METIS-249725",
    author = "Herman Soemers and K. Krastev and {van Lierop}, D.",
    year = "2008",
    month = "10",
    day = "19",
    language = "Undefined",
    isbn = "978-1-887706-47-6",
    pages = "--",
    booktitle = "Proceedings of the 23th ASPE Annual Meeting",
    publisher = "American Society for Precision Engineering",
    address = "United States",

    }

    Soemers, H, Krastev, K & van Lierop, D 2008, Design of a high frequency MEMS scanning mirror. in Proceedings of the 23th ASPE Annual Meeting. American Society for Precision Engineering, Portland, Oregon, USA, pp. -, 23th ASPE Annual Meeting 2008, Portland, United States, 19/10/08.

    Design of a high frequency MEMS scanning mirror. / Soemers, Herman; Krastev, K.; van Lierop, D.

    Proceedings of the 23th ASPE Annual Meeting. Portland, Oregon, USA : American Society for Precision Engineering, 2008. p. -.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Design of a high frequency MEMS scanning mirror

    AU - Soemers, Herman

    AU - Krastev, K.

    AU - van Lierop, D.

    PY - 2008/10/19

    Y1 - 2008/10/19

    KW - METIS-249725

    M3 - Conference contribution

    SN - 978-1-887706-47-6

    SP - -

    BT - Proceedings of the 23th ASPE Annual Meeting

    PB - American Society for Precision Engineering

    CY - Portland, Oregon, USA

    ER -

    Soemers H, Krastev K, van Lierop D. Design of a high frequency MEMS scanning mirror. In Proceedings of the 23th ASPE Annual Meeting. Portland, Oregon, USA: American Society for Precision Engineering. 2008. p. -