Design of a mechanical submicron measuring probe with a proximity sensor

L.R.M. Lacle

    Research output: Book/ReportReportProfessional

    Original languageEnglish
    Place of PublicationEnschede
    PublisherUniversity of Twente, Faculty of Electrical Engineering, Mathematics and Computer Science
    Number of pages92
    Publication statusPublished - 1996

    Cite this