Design of a miniature electrolyte conductivity probe using ISFETs in a four point configuration

A. Volanschi, A. Volanschi, Wouter Olthuis, Piet Bergveld

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    Abstract

    In this work the design, fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 ¿m allowing a chip area in contact with the electrolyte of 2.2×2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.
    Original languageUndefined
    Pages (from-to)404-407
    JournalSensors and actuators. B: Chemical
    Volume18
    Issue number19
    DOIs
    Publication statusPublished - 1994

    Keywords

    • METIS-111951
    • IR-15058

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