Design of a miniature electrolyte conductivity probe using ISFETs in a four point configuration

A. Volanschi; A. Volanschi; Wouter Olthuis; Piet Bergveld

doi:10.1016/0925-4005(93)01014-U

Design of a miniature electrolyte conductivity probe using ISFETs in a four point configuration

A. Volanschi, A. Volanschi, Wouter Olthuis, Piet Bergveld

Research output: Contribution to journal › Article › Academic › peer-review

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Abstract

In this work the design, fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 ¿m allowing a chip area in contact with the electrolyte of 2.2×2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.

Original language	Undefined
Pages (from-to)	404-407
Journal	Sensors and Actuators B: Chemical
Volume	18
Issue number	19
DOIs	https://doi.org/10.1016/0925-4005(93)01014-U
Publication status	Published - 1994

Keywords

METIS-111951
IR-15058

Access to Document

10.1016/0925-4005(93)01014-U

Volanschi94design

Cite this

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title = "Design of a miniature electrolyte conductivity probe using ISFETs in a four point configuration",

abstract = "In this work the design, fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 ¿m allowing a chip area in contact with the electrolyte of 2.2×2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.",

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AU - Volanschi, A.

AU - Olthuis, Wouter

AU - Bergveld, Piet

PY - 1994

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N2 - In this work the design, fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 ¿m allowing a chip area in contact with the electrolyte of 2.2×2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.

AB - In this work the design, fabrication and testing of a four point electrode configuration based on ISFETs for the measurement of electrolytic conductivity are presented. The final design uses a distance between the ISFET gates of only 100 ¿m allowing a chip area in contact with the electrolyte of 2.2×2.2 mm. KCl electrolyte concentrations ranging from 0.1 mM to 1 M were used for testing the designed probe. Measurement results show a linear dependence of the output voltage of the amplifier on the electrolyte concentration.

KW - METIS-111951

KW - IR-15058

U2 - 10.1016/0925-4005(93)01014-U

DO - 10.1016/0925-4005(93)01014-U

M3 - Article

SN - 0925-4005

VL - 18

SP - 404

EP - 407

JO - Sensors and Actuators B: Chemical

JF - Sensors and Actuators B: Chemical

IS - 19

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